BST Fabry-Perot micro-cavity and manufacture method
A technology of optical microcavity and barium strontium titanate, which is applied in the field of Fabry-Perot optical microcavity, can solve the problem of inability to realize dynamic tuning of device operating frequency, etc., and achieve the effect of convenient operation and simple equipment
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Embodiment 1
[0026] Embodiment 1: the preparation of single-mode optical microcavity:
[0027] §1. Preparation of precursor solution for preparing ferroelectric Bragg reflective film layer:
[0028] The solvent is glacial acetic acid, the stabilizer is caproyl acetone, and the thickener is polyvinylpyrrolidone.
[0029] The solute is strontium acetate, barium acetate and titanium n-butoxide, and their molar ratio is 0.9:0.1:1. Dissolve 2.7864g of barium acetate, 0.2603g of strontium acetate, and 0.65g of polyvinylpyrrolidone in 30ml of heated glacial acetic acid at a heating temperature of 40-80°C, then add about 2ml of hexanoylacetone, stir and let it cool, and finally add 4. 1670ml of titanium n-butoxide and continue to stir for 2-3 hours, add a small amount of distilled water to dilute, and filter to obtain a clear and transparent BST precursor solution with a molar concentration of about 0.3M / L. The solution will not deteriorate within a year.
[0030] §2. Preparation of precursor s...
Embodiment 2
[0036] Embodiment 2: Preparation of coupled optical microcavity
[0037] The preparation method is the same as in Example 1, and the final structure is: strontium titanate substrate 1\8 periods BST lower ferroelectric Bragg reflection film layer 2\BST zm Defect layer 3\6 period BST middle layer ferroelectric Bragg reflection layer 5\BST zm The coupling optical microcavity of the ferroelectric Bragg reflection film layer 4 on the upper layer of the defect layer 3\8 period BST.
[0038] The thickness of the upper and lower ferroelectric Bragg reflection layers is 1.2 μm, the thickness of the middle ferroelectric Bragg reflection layer is 0.8 μm, and the thickness of the two defect layers is 50 nm. FIG. 3 shows the reflection spectrum of the coupled optical microcavity in Example 2.
[0039] In order to illustrate that the operating frequency of the optical microcavity can be adjusted by changing the process parameters, we show the reflection spectra of the single-mode optical ...
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