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Reflective spatial light modulator

A spatial light modulator and incident light technology, applied in the field of micromirror arrays, can solve the problems of reducing the optical effective part of the equipment area, increasing production costs in the manufacturing process, and reducing mirror reflectivity.

Inactive Publication Date: 2007-12-26
MIRADIA INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These disadvantages include: reduced optical efficiency due to suboptimal optically active area (measured by the proportion of reflective portion of the device surface, also known as "fill ratio"), rough reflective surfaces that reduce reflectivity of mirrors, and reduced diffraction In addition to the contrast of the display, the materials used have problems in terms of long-term durability, and the complicated manufacturing process increases the production cost of the product
This technique often results in destruction of fine micromirror structures during release
It also requires large gaps between the mirrors, which reduces the optically active portion of the device area

Method used

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Embodiment Construction

[0027] A reflective spatial light modulator (“SLM”) 100 has an array 103 of deflectable mirrors 202 . By applying a bias voltage between an individual mirror 202 and a corresponding electrode 126, the mirror can be selectively deflected. The deflection of each mirror 202 controls the reflection of light from the light source to the video display. Thus, by controlling the deflection of mirror 202, light impinging on that mirror 202 can be reflected in a selected direction, thereby enabling the control of the appearance of pixels on the video display.

[0028] Spatial Light Modulator Overview:

[0029] Figure 1 shows the general structure of an SLM 100 according to one embodiment of the present invention. The illustrated embodiment has a three-layer structure. The first layer is the mirror array 103 , which consists of a plurality of deflectable micromirrors 202 . In a preferred embodiment, the micromirror array 103 is fabricated from the first substrate 105 as a single mate...

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Abstract

Production of reflective spatial light modulator containing micro-mirror array is provided. In one embodiment, the micro-mirror array is produced from single-crystal substrate through two primary etching steps. A cavity forms in a first side in the first etching step, and support walls, a vertical hinge, and a mirror plate form in the second etching steps. At the interval of the first and the second etching steps, the substrate is welded on the address and control circuits by pressure.

Description

technical field [0001] This invention relates to spatial light modulators (SLMs), and more particularly to micromirror arrays with electronically addressable control circuits for use in display devices. Background technique [0002] Spatial light modulators (SLMs) have numerous applications in optical information processing, projection displays, video and graphics monitors, televisions, and electrophotographic printing. Reflective SLMs are devices that modulate incident light in a spatial pattern to reflect an image corresponding to an electronic or optical input. The incident light can be modulated in terms of phase, intensity, polarization or deflection direction. Reflective SLMs generally consist of areas or two-dimensional arrays of addressable picture elements (pixels) capable of reflecting incident light. The source pixel data is first processed by the associated control circuitry and then loaded onto the pixel array, one frame at a time. [0003] Prior art SLMs suf...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/08G02B7/182
Inventor 晓和·X·潘杨晓陈东敏
Owner MIRADIA INC