EL display part and its making method
A technology of electroluminescence display and manufacturing method, which is applied to electroluminescence light sources, electric light sources, electrical components, etc., and can solve the problems of affecting the luminous efficiency of electroluminescence devices, and the effect of transparent electrodes on organic functional layers.
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[0066] The technical solution will be further described below through the preparation process of the electroluminescent display device of the present invention.
[0067] Figure 1a is a schematic diagram of forming a gate electrode according to the present invention. A metal thin film is deposited on a rigid first substrate 10, and a gate electrode 11 is formed on a certain area through a photolithography process and a chemical etching process using a gate mask. The material of the metal thin film may be metals such as AlNd, Mo, Al, etc., or a combination of the above materials.
[0068] FIG. 1 b is a schematic diagram of forming a gate insulating layer according to the present invention. A gate insulating layer 12 is deposited on a first substrate 10 with a gate electrode pattern by using a chemical vapor deposition process. The material of the gate insulating layer 12 may be silicon nitride or silicon oxide.
[0069] FIG. 1c is a schematic diagram of forming an active layer ...
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