Graphite boat for improving mercury cadmium telluride rheotaxy membrane surface shape

A technology of liquid phase epitaxy and surface morphology, which is applied in the field of graphite boats, can solve problems such as surface ripples and epitaxial film surface ripples, and achieve the effects of reducing ripples, eliminating unevenness, and slowing down mother liquor convection

Active Publication Date: 2008-01-23
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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Problems solved by technology

But another unfavorable aspect is: the convection intensity of the molten mother liquor is related to the pressure above the liquid surface. If the mercury source tank is placed behind the mother liquor tank, near the epitaxial film near the mercury source tank, due to the mercury parti

Method used

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  • Graphite boat for improving mercury cadmium telluride rheotaxy membrane surface shape
  • Graphite boat for improving mercury cadmium telluride rheotaxy membrane surface shape

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Embodiment Construction

[0012] The specific embodiment of the present invention is described in further detail below in conjunction with accompanying drawing:

[0013] Graphite boat of the present invention comprises: base plate 6, slide block 5, cover plate 4 and base 10, base plate 6 is fixed on the base 10, slide block 5 places above the base plate, and slide block can move left and right relative to base plate. There is a substrate channel with the same size as the epitaxial substrate on the base plate, and the substrate channel uses the base as a support to form a substrate groove 7. The substrate groove is equipped with a quartz gasket 12 for adjusting the height of the substrate and the notch. The quartz gasket Place the substrate 13 on it. The slide block 5 is provided with a mother liquid channel for placing the mother liquid 8, and the mother liquid channel will be located in the middle of the slide block, so as to make the mother liquid 8 evenly heated. The mother liquid channel uses the ...

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Abstract

The invention discloses a graphite boat for improving the surface shape of the extended liquid-phase film of merury cadmium telluride, which is characterized in that the mercury supply tank formerly placed at front or rear of the mother liquid tank is changed to be placed right above the mother liquid tank, a channel is provided between the two tanks for communicating; the mercury steam generated by the mercury supply tank supplements mercury into the mother liquid from the top of the mother liquid tank, so that the supplementing of the mercury steam generated by the mercury supply tank becomes more even, hence the pressure above the mother liquid is more even; in addition, as the front and the rear strcuture of the mother liquid tank are similar, the temperature field surrounding the mother liquid tank becomes more even. The advantages with the invention is that the uneveness of pressure and temperature field can be removed to the max. extent, convection of mother liquid is slowed, hence the corrugation on the surface of the extended material is reduced.

Description

technical field [0001] The invention relates to liquid phase epitaxial growth technology of thin film materials, in particular to a graphite boat used for the growth of mercury cadmium telluride liquid phase epitaxial material, and the growth of mercury cadmium telluride liquid phase epitaxial material by using the graphite boat can suppress the defects of material surface corrugation . Background technique [0002] HgCdTe epitaxial thin film material is the material of choice for manufacturing infrared detectors of various wavelengths. It has an important application background in military, national defense and space fields. The second-generation infrared detector developed in recent years, the mercury cadmium telluride focal plane device, is a two-dimensional array of multiple detection units. The preparation of this device requires epitaxial thin film materials with a large area and uniform chemical composition. Liquid phase epitaxy is currently the most mature HgCdTe f...

Claims

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Application Information

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IPC IPC(8): C30B19/06C30B29/48
Inventor 魏彦锋徐庆庆杨建荣陈新强
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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