Graphite boat for improving mercury cadmium telluride rheotaxy membrane surface shape

Abstract

The invention discloses a graphite boat for improving the surface shape of the extended liquid-phase film of merury cadmium telluride, which is characterized in that the mercury supply tank formerly placed at front or rear of the mother liquid tank is changed to be placed right above the mother liquid tank, a channel is provided between the two tanks for communicating; the mercury steam generated by the mercury supply tank supplements mercury into the mother liquid from the top of the mother liquid tank, so that the supplementing of the mercury steam generated by the mercury supply tank becomes more even, hence the pressure above the mother liquid is more even; in addition, as the front and the rear strcuture of the mother liquid tank are similar, the temperature field surrounding the mother liquid tank becomes more even. The advantages with the invention is that the uneveness of pressure and temperature field can be removed to the max. extent, convection of mother liquid is slowed, hence the corrugation on the surface of the extended material is reduced.

Description

technical field [0001] The invention relates to liquid phase epitaxial growth technology of thin film materials, in particular to a graphite boat used for the growth of mercury cadmium telluride liquid phase epitaxial material, and the growth of mercury cadmium telluride liquid phase epitaxial material by using the graphite boat can suppress the defects of material surface corrugation . Background technique [0002] HgCdTe epitaxial thin film material is the material of choice for manufacturing infrared detectors of various wavelengths. It has an important application background in military, national defense and space fields. The second-generation infrared detector developed in recent years, the mercury cadmium telluride focal plane device, is a two-dimensional array of multiple detection units. The preparation of this device requires epitaxial thin film materials with a large area and uniform chemical composition. Liquid phase epitaxy is currently the most mature HgCdTe f...

AI Technical Summary

Problems solved by technology

But another unfavorable aspect is: the convection intensity of the molten mother liquor is related to the pressure above the liquid surface. If the mercury source tank is placed behind the mother liquor tank, near the epitaxial film near the mercury source tank, due to the mercury partial pressure High, strong convection, severe surface ripples will appear on the surface of the grown epitaxial film

Similarly, if the mercury source tank is placed in front of the mother liquor tank, there will be surface ripples near the mercury source tank in front of the epitaxial film

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