Vacuum processing device, diagnostic method for static electricity chuck and storing medium
A technology of vacuum processing device and electrostatic chuck, which is applied to positioning devices, circuits, electrical components, etc., can solve problems such as electrostatic damage and achieve the effect of preventing damage
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[0091] 1 to 3, an embodiment in which the vacuum processing device of the present invention is applied to a plasma processing device that performs an etching processing device on a glass substrate for a liquid crystal display will be described. FIG. 1 is an example of the plasma processing apparatus 1. For example, the plasma processing apparatus 1 has a processing container 11 composed of a vacuum container with a sealed space inside, an antenna container 51 provided on the upper part of the processing container 11, and a gas spray provided between the processing container 11 and the antenna container 51 The head 41 is a mounting table 2 arranged opposite to the gas shower head 41 in the center of the bottom surface of the processing container 11.
[0092] The processing container 11 contains a mounting table 2 and a hollow pillar 16 supporting the mounting table 2 and accommodating pipes and the like, and an exhaust device 13 including a vacuum pump and the like is connected to ...
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