Method for removing sapphire substrate on blue-light luminescent chip
A technology of sapphire substrate and blue light emission, which is applied in the field of removing the sapphire substrate of blue light emitting chips, can solve problems such as complicated process, decrease of luminous efficiency, heat conduction hindrance, etc., and achieve the goal of improving luminous efficiency, lowering temperature and improving heat dissipation performance Effect
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Embodiment 1
[0012] Embodiment 1: In this example, we take a single light-emitting chip as an example to illustrate how to implement the present invention.
[0013] Specific steps are as follows:
[0014] 1. Pour a 5% sodium hydroxide solution into a petri dish with a flat bottom, and the height of the solution should be controlled below 100 microns;
[0015] 2. Put a chip containing a sapphire substrate into the sodium hydroxide solution, so that a part of the sapphire substrate is immersed in the sodium hydroxide solution, and let it stand for 12 hours, so that most of the sapphire substrate is corroded;
[0016] 3. Rinse the chip with deionized water, put it in an oven, and bake it at 100 degrees Celsius for 1 hour.
Embodiment 2
[0017] Embodiment 2: In this example, we take a wafer containing multiple light-emitting chips as an example to illustrate how to implement the present invention. Specific steps are as follows:
[0018] Pour a 2% sodium hydroxide solution or other alkaline solution that can react with sapphire into a petri dish with a flat bottom. The height of the solution should be controlled below 100 microns;
[0019] Put a wafer containing multiple light-emitting chips into the sodium hydroxide solution, so that a part of the sapphire substrate is immersed in the sodium hydroxide solution, and let stand for 24 hours, so that most of the sapphire substrate is corroded;
[0020] Rinse the chip with deionized water, put it in an oven, and bake it at 100 degrees Celsius for 2 hours.
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