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Fluororubber molded article, and rubber material and o-ring using the same

A rubber material, fluororubber technology, applied in the field of fluororubber molding products, can solve problems such as device failure, reduction of elasticity and strength of rubber materials, and rubber powder falling off

Inactive Publication Date: 2008-06-18
NICHIAS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Often, the rubber material tends to stick to the metal surface being sealed, making it prone to problems with the proper functioning of the restraint in devices that are frequently opened and closed
In addition, during maintenance, the sealing material adheres too strongly to the metal surface so that the sealing material cannot be easily peeled off
When trying to forcibly peel off, there is a problem that the rubber powder comes off due to friction, thereby causing the device to malfunction
When the filling amount of the resin powder is increased in order to solve such a problem, it causes a problem that the elasticity and strength of the rubber material decrease, and the cross-linking moldability deteriorates

Method used

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  • Fluororubber molded article, and rubber material and o-ring using the same
  • Fluororubber molded article, and rubber material and o-ring using the same

Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0035] (Preparation of Fluorine Rubber Molded Products)

[0036] 20 parts of MT carbon, 3 parts of magnesium oxide, 6 parts of calcium hydroxide and 0.5 part of fatty acid ester were added to 100 parts of binary copolymer G7801 (containing bisphenol A as a crosslinking agent) manufactured by Daikin Industries Co., Ltd., and kneaded in an open roll mill. The resulting mixture was heat-treated at a temperature of 170° C. for 10 minutes to perform primary crosslinking, and then heat-treated at 230° C. for 24 hours to perform secondary crosslinking, thereby obtaining a sheet-shaped fluororubber molded product of 100 mm×100 mm×6 t .

Embodiment 1

[0038] The above fluororubber molded products were placed in the chamber of a surface wave plasma irradiation device and irradiated for 3 minutes under the following conditions to prepare respective samples.

[0039] Output power: 3,000W

[0040] Gas type: CF 4

[0041] Gas flow rate: 300cc / min

[0042] Temperature of basic raw material: 30°C

[0043] Vacuum during heat treatment: 6Pa

Embodiment 2

[0045] Samples were prepared in the same manner as in Example 1, except that the vacuum degree during plasma irradiation was changed to 50 Pa to prepare samples.

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PUM

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Abstract

The present invention provides a fluororubber molded article having a fluorinated surface, wherein the fluorinated surface has a ratio of the number of oxygen atoms to the number of fluorine atoms of 0.11 or less, and a ratio of the number of C-H bonds to the number of C-F2 bonds is 1.0 or less, and wherein the fluororubber molded article shows a leak amount 3 minutes after initiation of a helium leak test of 1.0x10<-12 >Pa.m<3> / sec or less.

Description

technical field [0001] The present invention relates to fluororubber molded articles with improved surface properties, and more particularly, the present invention relates to fluororubber molded articles suitable for use in semiconductor manufacturing equipment, semiconductor transport equipment, liquid crystal manufacturing equipment, vacuum equipment, and the like. Background technique [0002] Hitherto, sealing materials such as O-rings used in semiconductor manufacturing equipment, semiconductor conveying equipment, liquid crystal manufacturing equipment, vacuum equipment, etc. have been required to have plasma resistance, heat resistance, cleanability, chemical resistance properties, etc., and fluororubber materials have been widely used. [0003] Typically, the rubber material tends to stick to the metal surface being sealed, making it prone to problems with the proper functioning of the restraint device in devices that are frequently opened and closed. In addition, a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C08L27/12C08J7/12C08J5/00
CPCY10T428/215C08J2327/16C08J7/123C08F214/18C08L15/02C08J5/00
Inventor 洼山刚九泽直也
Owner NICHIAS CORP
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