Grid pressure sensing chip and preparation method, pressure distributed sensor

Abstract

The invention discloses a grid pressure sensing chip and a preparation method thereof, and a pressure distribution sensor. The grid pressure sensing chip comprises an insulating bottom layer, an upperlayer, and a row and a column electrode configuration layer arranged between the insulating bottom layer and the upper layer, wherein a plurality of row electrodes are arranged in the row electrode configuration layer; a plurality of column electrodes are arranged in the column electrode configuration layer to form a grid distribution together with the row electrodes; an intermediate layer is arranged between the row and the column electrode configuration layers; a plurality of pressure sensitive bodies are arranged in the intermediate layer just at the cross points of the row and the columnelectrodes; each pressure sensitive body is respectively connected with one row electrode and one column electrodes at two end faces thereof; and the insulating bottom layer, the upper layer, the rowand the column electrode configuration layer and the intermediate layer integrally form a rectangular sheet. The pressure distribution sensor comprises a frame, a plurality of grid pressure sensing chip spliced in the frame, and electrode connection structures arranged on inner two sides of the frame. The inventive grid pressure sensing chip and the sensor can conveniently detect the pressure distribution on a local contact surface.

Description

technical field [0001] The invention relates to a flexible film grid pressure sensing chip and a preparation method thereof, and a pressure distributed sensor for detecting the pressure distribution on a certain local contact surface combined with the pressure sensing chip. Background technique [0002] The detection principle of the pressure sensor is based on the elastic compression deformation of the pressure-sensitive material caused by the external pressure, so that its resistance changes (piezoresistive effect), and the external pressure is measured by measuring the change in the resistance of the pressure-sensitive material. Pressure sensors are widely used in aerospace, military industry, automobiles, ships, and medical and health fields, and are playing an increasingly important role. However, in some special occasions, it is sometimes necessary to detect the pressure distribution on a certain local contact surface, such as detecting the pressure distribution of a c...

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Problems solved by technology

[0003] In order to solve the shortcomings of traditional pressure sensors that cannot detect the pressure distribution on a certain contact surface, large volume, heavy weight, and inconvenient operation; , micromechanical electronic system] process preparation method, the further purpose is to provide a pressure distributed sensor combined with the sensor chip

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