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Teaching track optimized controlling method of magnetic-controlled spraying robot

A spraying robot and magnetron sputtering technology, applied in the direction of program control manipulators, manipulators, manufacturing tools, etc., can solve problems such as difficulty in meeting requirements, inability to process substrates, and insufficient vacuum chambers

Inactive Publication Date: 2010-09-29
BEIJING UNIV OF POSTS & TELECOMM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the vacuum chamber of domestic vacuum magnetron coating machine is not large enough to process substrates with complex structures.
Moreover, the shape of the processed substrate is basically fixed in several styles, and it is impossible to process various substrates, which is difficult to meet the demand
[0003] The main function of robot teaching has been realized on the original software of the control system, but the robot is located in an opaque vacuum chamber, and the actual motion state of the robot cannot be observed in real time during the teaching operation on the control system. Two people cooperate with each other, one person operates beside the control system, and the other person observes beside the robot, which is very inconvenient, affects the effect of robot teaching, and also poses safety hazards

Method used

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  • Teaching track optimized controlling method of magnetic-controlled spraying robot
  • Teaching track optimized controlling method of magnetic-controlled spraying robot
  • Teaching track optimized controlling method of magnetic-controlled spraying robot

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] In this example, the computer uses a commonly used notebook computer, and an RS-232 serial interface is used to connect the industrial computer and the notebook computer to realize the interaction between the two. The control system controls the operation of the robot, and the sputtering target is installed on the robot arm.

[0033] The computer reversely decodes the obtained trajectory data into the data of each axis movement of the robot, the data format is as follows;

[0034] The 0th byte: 0xFF start flag

[0035] The first byte: n the length of the transmitted data (not including the end flag), n<256

[0036] The second byte: ID event number

[0037] The third byte: ID1 event number, ID1=ID

[0038] …………… extra information

[0039] The nth byte: 0x00 end flag

[0040] In order to facilitate the identification and handling of events, all related events are numbered as follows:

[0041] Event number Event meaning

[0042] 1 X backward

[0043] 2 X forward

[0044] 3 Y to...

Embodiment 2

[0088] This example uses the Stl file as the source file to illustrate the process of obtaining the three-dimensional trajectory of the curved surface.

[0089] Read Stl file

[0090] The Stl file is actually a collection of many triangles. It gives the coordinates of the three vertices of each triangle and the normal vector of the triangle. The data storage format is as follows:

[0091] facet normal 9.763660e-001-3.565955e-002 2.131615e-001

[0092] outer loop

[0093] vertex-3.640531e+002 4.261792e+003 4.675909e+002

[0094] vertex-3.656961e+002 4.195778e+003 4.640729e+002

[0095] vertex-3.651771e+002 4.207171e+003 4.636015e+002

[0096] endloop

[0097] endfacet

[0098] The data in the stl file can be read into the designed singly linked list. The nodes of the singly linked list can be expressed in the following format:

[0099] Struct Triangle

[0100] {

[0101] CPOINT N; / *normal vector* /

[0102] CPOINT A; / *Vertex 1* /

[0103] CPOINT B; / *Vertex 2* /

[0104...

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Abstract

The invention provides a magnetic control sputtering spraying robot teaching track optimum control method. The invention is characterized in that the obtained teaching tracks are inversely solved into the data of the motion of all axis of the robot by a computer; the data is then transmitted to a control system which controls the operation of the robot, thus leading the sputtering target which isgrabbed by the robot to move according to the teaching track. The experiment shows that by adopting the invention, the coating of a plurality of complex basic sheets can be achieved and excellent coating effect is obtained.

Description

Technical field [0001] The invention relates to a magnetron sputtering spraying technology, in particular to an optimized control method for a teaching track of a magnetron sputtering spraying robot. Background technique [0002] Magnetron sputtering, also called high-speed and low-temperature sputtering, is a very effective thin film deposition method. Compared with the evaporation method, it has a strong bonding force between the coating layer and the substrate, and the coating layer is dense and uniform. The composition is easy to control and other advantages. Used for film deposition and surface treatment in terms of trinos, optical films, materials, etc. Sputtering is a complex process in which the energy and momentum transfer during the collision between ions and atoms on the surface of the substance, and finally the atoms on the surface of the substance are excited. During the sputtering process, Ar+ directly bombards the surface of the material with an energy of more th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B25J9/16B25J9/22C23C14/35
Inventor 邓中亮刘爱斌
Owner BEIJING UNIV OF POSTS & TELECOMM
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