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Integrated 5-axis movement sensor based on MEMS technology

A motion sensor and sensor technology, applied in the field of motion sensors, can solve problems affecting the development of multi-axis sensor integration, high complexity, and cost, and achieve the effects of easy environmental noise and drift, large driving dynamic range, and improved resolution

Inactive Publication Date: 2008-09-24
江苏英特神斯科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the extremely high complexity and cost of integrating multi-axis inertial sensors on a single chip has affected the development of multi-axis sensor integration.

Method used

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  • Integrated 5-axis movement sensor based on MEMS technology
  • Integrated 5-axis movement sensor based on MEMS technology
  • Integrated 5-axis movement sensor based on MEMS technology

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0045] A first example consistent with the present invention is shown in figure 1 with figure 2 middle.

[0046] The structure of embodiment one has a square annular outer frame 2, and it will be subjected to figure 2 Driving in the paper direction (ie along the Z axis); four outer elastic beam arms 3 are placed on each outer corner of the frame 2 to play the role of suspending the frame. The four outer elastic beam arms 3 have the same height and extend outward from the bottom surface of the outer frame mass 2 . The inner ring structure of the frame 2 is four mass blocks (4-7), which occupy most of the area of ​​the inner ring of the frame 2. The centers of the four sensing masses occupy four symmetrical positions in frame 2. The four sensing masses in frame 2 have the same level and height. In the exposed structure 1, each sensing mass 4 has four parallel beam arms (41-44) connected to it, and two of the beam arms (41, 44) are connected to the frame and two remote be...

Embodiment 2

[0049] image 3 with Figure 4 A second example consistent with the present invention is given.

[0050] The structure in embodiment two has the outer frame 101 of circular ring, and it will be along the vertical plane on Figure 4 (that is, along the z-axis); four outer elastic beams 102 are used to support the frame 101. These four outer beams 101 have the same height and extend outward from the bottom surface of the outer beam mass 101. The four outer beams 102 The beam arms are evenly spaced along the frame. Figure 4 , they are along the X and Y directions. The inner structure of the frame 2 has four sense masses (104-107), which are in the frame 101, with different directions but the same fan shape. The frame 101 and the four inner masses (104-107) have the same height and thickness. The four masses (104-107) form two sensing pairs. Masses 105 and 107 form a pair. Masses 104 and 106 form another pair. In the structure disclosed in this embodiment, the proximal end o...

Embodiment 3

[0054] Figure 5 A specific cross-sectional view of a capacitive motion sensor consistent with this invention is depicted. In this example the structural layer is sandwiched between two base layers forming a differential capacitance.

[0055] with the aforementioned Figure 1-4 Similar to the example in , the structural layer consists of a frame and a mass connected to it by elastic beam arms. In fact, removing the base layer on top, Figure 5 structure in and Figure 1-4 The structure in is very similar. After adding the top base layer and its electrodes, each mass in the structural layer constitutes the central plate in the differential capacitance structure. As the proof mass moves relative to the electrodes in the top and lower layers, one of the differential capacitances increases and the other decreases. The results are Figure 5 The example shown results in higher sensitivity and greater tolerance to temperature variations.

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Abstract

The invention discloses an integrated five-axis motion sensor based on MEMS technology, which includes a frame moving along a spindle, two pairs of same inductive mass blocks, an outer elastic structure and two pairs of electrodes. Each inductive mass block is hanged on the frame by an inner elastic structure, the frame is hanged on a sensor platform by the outer elastic structure, the two pairs of inductive mass blocks are connected to form a capacitance sensor; four mass blocks are located in the same plane when the frame does not move, the first pair of the capacitance sensors are used for sensing the first motion of the frame relative to the sensor platform; and the second pair of the capacitance sensors are used for sensing the second motion of the frame relative to the sensor platform. The five-axis motion sensor of the invention can measure a plurality of axial acceleration and rotation at the same time, which has high resolution, rather low inter-axle crosstalk sensitivity and strong resistance to environmental noise, and uses MEMS technology for low cost and mass production.

Description

technical field [0001] The invention relates to a motion sensor, in particular to an integrated five-axis motion sensor based on MEMS technology. Background technique [0002] Micro-accelerometers and gyroscopes have a wide range of applications in automotive control, game input and output, navigation and other fields. At present, the research and development of this kind of sensor mainly focuses on single-axis micro-gyroscope and multi-axis accelerometer. Of course, integrated multi-axis devices will find wide application in a variety of market segments by allowing a single chip to simultaneously measure acceleration and rotation. However, the extremely high complexity and cost of integrating multi-axis inertial sensors on a single chip has affected the development of multi-axis sensor integration. Therefore, a low-cost, single-chip, multi-axis inertial sensor has become a highly desired MEMS device. Contents of the invention [0003] The present invention proposes a f...

Claims

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Application Information

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IPC IPC(8): G01C19/56G01P15/02G01P15/125G01C19/574
Inventor 何野徐波
Owner 江苏英特神斯科技有限公司
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