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Resonance type micro accelerometer

An accelerometer and resonance technology, applied in the direction of measuring acceleration, speed/acceleration/shock measurement, TV, etc., can solve the problems of internal residual stress of measurement sensitivity, and achieve good development prospects, high sensitivity, and improved sensitivity

Inactive Publication Date: 2008-11-12
ZHONGBEI UNIV
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  • Abstract
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AI Technical Summary

Problems solved by technology

[0003] In order to solve the problem that the measurement sensitivity of the traditional stress-based resonant accelerometer is easily affected by internal residual stress and other factors, the present invention provides a high-sensitivity resonant micro-accelerometer

Method used

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  • Resonance type micro accelerometer

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Embodiment Construction

[0012] As shown in Figure 1-3, the resonant micro accelerometer includes a glass substrate 1, a mass block 2, and two double-ended fixed tuning fork resonators arranged on the glass substrate 1, and the double-ended fixed tuning fork resonator includes a double-ended fixed tuning fork 3, The sensitive capacitor 4 and the driving capacitor 5 are respectively arranged on both sides of the double-ended fixed tuning fork 3, the driving capacitor 5 is a comb-tooth capacitor, the two double-ended fixed tuning fork resonators 3 are arranged in parallel / row, and the sensitive capacitor sides are opposite, and the sensitive capacitor 4 includes Several plates on one side are fixed by the connecting beam 6 and the tuning fork beam of the double-ended tuning fork 3. The plate capacitor on the other side of the plate capacitor is integrally fixed together by the supporting connecting beam 7; the mass block 2 is arranged at both ends Between the fixed tuning fork resonators, between the mas...

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Abstract

The invention relates to the technical field of micro mechanical electronics, in particular to a resonance micro accelerometer with high sensitivity, which solves the problem that the measuring sensitivity of traditional resonance accelerometers based on stress change is easy to be affected by interior residual stress and other factors. The accelerometer comprises a glass substrate, a mass block, two DETF resonators and a sensitive capacitor. The resonators are arranged in parallel / row and opposite to the side of the sensitive capacitor. The sensitive capacitor comprises a plurality of plate capacitors, polar plates at one side of which are fixed to the tuning forks by an articulated beam and polar plates at the other side of which are fixed by a supporting and connecting beam; the mass block is arranged between the two resonators, and a pair of symmetrical micro levers are arranged between the mass block and the two resonators respectively; the micro levers at the two sides of the mass block are symmetrical corresponding to the mass block, and one end of the micro level is fixed on the mass block and the other end on the supporting and connecting beam of the plate capacitor. The accelerometer of the invention has the advantages of reasonable structure, low volume, high sensitivity, good detecting effect and good development prospect.

Description

technical field [0001] The invention relates to the technical field of micro-mechanical electronics, in particular to a high-sensitivity resonant micro-accelerometer. Background technique [0002] The micromechanical resonant acceleration sensor is a typical micromechanical inertial device. It uses the resonance principle as the sensitive modulation method of the sensor, and directly converts the measured signal into a vibration frequency signal, and the frequency signal has high anti-interference ability and stability. In addition, distortion errors are not easy to occur during transmission, and A / D conversion is not required during signal processing, which simplifies the processing circuit and reduces the difficulty of detection, making the micro-mechanical resonant accelerometer have strong anti-interference Capability and high sensitivity; Among them, the double-ended tuning fork DETF (double-ended tuning fork) structure is one of the typical structures used in the reson...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/097B81B7/02
Inventor 熊继军张文栋石云波李丽华王楷群
Owner ZHONGBEI UNIV
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