Multifunctional dielectrophoresis operated micro-electrode on-chip system and its manufacture method
A system-on-chip, micro-electrode technology, which is applied to components of TV systems, electrophoretic plating, generators/motors, etc., can solve problems such as complex repetitive work, and achieve the effect of wide applicability and low cost
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[0046] The technical characteristics of the present invention will be further elaborated below in conjunction with the accompanying drawings and specific embodiments.
[0047] Now pass a 2.1×2.3cm 2 The design and fabrication and testing of a microelectrode system-on-a-chip further describe the present invention.
[0048] 1. Design
[0049] Comprehensively consider the influence of micro-electrode shape and spacing, material and electrode size ratio on the manipulation of electric field, design micro-electrodes and array series with different shapes and spacing, and manufacture various electrodes and array series on silicon materials through micro-processing technology .
[0050] Microelectrode and array design such as figure 1As shown, 1. A pair of parallel flat-plate electrodes with a spacing of 200, 100, 50, 30, 20, and 10 microns, and a triangular pair of flat-plate electrodes with sharp angles of 90, 60, and 30 degrees, respectively. 90, 60, 30 pairs of triangular ele...
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