Multifunctional dielectrophoresis operated micro-electrode on-chip system and its manufacture method

A system-on-chip, micro-electrode technology, which is applied to components of TV systems, electrophoretic plating, generators/motors, etc., can solve problems such as complex repetitive work, and achieve the effect of wide applicability and low cost

Inactive Publication Date: 2008-11-19
EAST CHINA NORMAL UNIV
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  • Abstract
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  • Claims
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Problems solved by technology

Materials with different dielectric constants, shapes and sizes will have different requirements for microelectrodes through dielectrophoresis manipulation, so it will be a very complicated and repetitive work to design and manufacture the corresponding electrode structure according to the material

Method used

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  • Multifunctional dielectrophoresis operated micro-electrode on-chip system and its manufacture method
  • Multifunctional dielectrophoresis operated micro-electrode on-chip system and its manufacture method
  • Multifunctional dielectrophoresis operated micro-electrode on-chip system and its manufacture method

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Embodiment Construction

[0046] The technical characteristics of the present invention will be further elaborated below in conjunction with the accompanying drawings and specific embodiments.

[0047] Now pass a 2.1×2.3cm 2 The design and fabrication and testing of a microelectrode system-on-a-chip further describe the present invention.

[0048] 1. Design

[0049] Comprehensively consider the influence of micro-electrode shape and spacing, material and electrode size ratio on the manipulation of electric field, design micro-electrodes and array series with different shapes and spacing, and manufacture various electrodes and array series on silicon materials through micro-processing technology .

[0050] Microelectrode and array design such as figure 1As shown, 1. A pair of parallel flat-plate electrodes with a spacing of 200, 100, 50, 30, 20, and 10 microns, and a triangular pair of flat-plate electrodes with sharp angles of 90, 60, and 30 degrees, respectively. 90, 60, 30 pairs of triangular ele...

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Abstract

The invention discloses a multifunctional dielectrophoresis manipulated microelectrode SOC (system on a chip) and a method for making the same. The invention is characterized in that under the comprehensive consideration of influences of shape, distance, material and proportion of size of the microelectrode on the distribution of manipulating electric field and requirements of the dielectrophoresis manipulation in production study, the SOC is provided inside with a series of electrodes and arrays with different shapes and distances by the micro-processing technique in order to provide designs for microelectrodes and arrays with different shapes and distances needed for different materials waiting for manipulation. The products obtained by the method have the advantages that: 1. the mass production is realized by standard micro-processing technique, so that the cost is quite low; 2. the microelectrode SOC comprises shapes and sizes of usual electrodes needed for production study, so that the microelectrode SOC has wide adaptability.

Description

technical field [0001] A multifunctional dielectrophoresis control microelectrode on-chip system and a manufacturing method thereof belong to the technical field of design of on-chip experimental platforms and micro-processing and manufacturing. Background technique [0002] Dielectrophoretic technology is to apply an AC signal of a certain amplitude and frequency between pre-designed electrodes to generate a non-uniform electric field between the electrodes, so that the manipulated object in between can obtain a certain positive (negative) dielectrophoretic force, thus to the strong ( Weak) electric field area moves, so as to realize the manipulation of micro-nano materials. It is a very potential manipulation technology for micro-nano materials. This manipulation is not limited by the conductive properties of the material itself, the shape of the material, etc., and is applicable to all micro-nano structures (such as nanomaterials, biological particles, etc.). Therefore ,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C25D13/00B81B7/02B81C1/00C23C14/22C23C14/14
Inventor 唐晓东刘伟景蒋珂玮王玉才许修兵
Owner EAST CHINA NORMAL UNIV
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