Sound suspending polishing device for nanometer mechanics characterization sample

Abstract

The invention discloses an acoustic levitation polishing machine of mechanically representing nano test samples and comprises a machine frame, a pulse power source, a holding fixture that is used for clamping a working piece to be processed, an ultrasonic energy transducer, a container that is used for storing polishing liquid, an ultrasonic reflecting end, and a tuning mechanism that is used foradjusting the distance between the ultrasonic reflecting end and the ultrasonic energy transducer. The ultrasonic energy transducer, the container and the tuning mechanism are all arranged above the machine frame, the pulse power source is connected with the ultrasonic energy transducer, the container is arranged under the ultrasonic energy transducer, the holding fixture is arranged above the container and is connected with a belt wheel actuating mechanism, and the ultrasonic reflecting end is arranged under the container, coordinated with the ultrasonic energy transducer and connected with the tuning mechanism. The invention provides an acoustic levitation polishing machine of the mechanically representing nano test samples with good applicability and well polishing effect.

Description

technical field [0001] The invention relates to a grinding and polishing machine equipment, in particular to an acoustic levitation polishing equipment for nanomechanical characterization samples. Background technique [0002] Nanoindentation system technology is gradually becoming one of the most important testing methods in the field of nanomechanical characterization. It can accurately complete indentation experiments with a range of tens of nanometers, forming a nanoindentation measurement technology. However, the sample preparation method for nanomechanical characterization is a recognized technical problem in this field that needs to be solved urgently. The more processing methods used today are focused ion beam processing, elastic emission processing, fluid vibration polishing technology, etc. Although these methods have achieved certain results in the preparation of samples for nanomechanical characterization, there are still many problems. Such as focused ion beam ...

AI Technical Summary

Problems solved by technology

[0003] In order to overcome the shortcomings of poor applicability and poor polishing effect of the existing sample preparation equipment for nanomechanical characterization, the present invention provides an acoustic levitation polishing equipment for nanomechanical characterization samples with good applicability and good polishing effect

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