Synchronization triggering on-line diagnostic method and system for photoetching machine
A technology for synchronizing triggering and diagnosing systems, applied in microlithography exposure equipment, photolithography process exposure devices, etc., can solve the problems of asynchronous data timing, inability to locate synchronous timing, and inability to quickly locate lithography machine problems, etc. Achieve the effect of rapid positioning, saving time for integration and technical support
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0036] According to Figure 1 ~ Figure 3 , Specifically describe the preferred embodiments of the present invention:
[0037] Such as figure 1 As shown, the present invention provides a lithography machine synchronous trigger diagnosis system including two sub-systems, including: a main controller 1; two sub-system controllers 2; two trigger diagnosis buffer boards 4; three sub-systems System control daughter card 3.
[0038] Such as figure 1 In the system shown, the trigger diagnostic buffer board 4 exists in each sub-system of the lithography machine system, and the trigger diagnostic buffer board 4 and the sub-system controller 2 and the sub-system control sub-card 3 and the sub-system control sub-card 3 They are connected via a standard VME bus. The trigger diagnosis buffer board 4 is connected through a hardware synchronization signal line. These trigger diagnostic buffer boards provide a special ring buffer for storing the diagnostic data on the sub-system controller 2 and...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap