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Laser processing device

A laser processing and laser technology, applied in the direction of laser, laser welding equipment, laser parts, etc., can solve the problem of not being able to irradiate laser, DMD or fiber degradation, etc., and achieve the effect of preventing degradation

Inactive Publication Date: 2009-03-11
OLYMPUS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there is a disadvantage that it is not possible to irradiate laser light with a certain intensity or more in consideration of deterioration of the DMD or optical fiber if the intensity of the laser light is high.

Method used

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  • Laser processing device
  • Laser processing device
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Embodiment Construction

[0035] Regarding the laser processing device 1 of one embodiment of the present invention, refer to Figure 1 to Figure 4 Described below.

[0036] Such as figure 1As shown, the laser processing apparatus 1 of the present embodiment has: a stage 2 that can be driven in two horizontal directions; processing object) A laser light for irradiation; DMD (Spatial Modulation Device) 4, which shapes the position and shape of the laser light generated from the laser light source 3; and an irradiation optical system 5, which irradiates the laser light shaped by the DMD 4 to Glass substrate A for liquid crystal panel; Imaging optical system 6, it is imaged to the image of glass substrate A for liquid crystal panel; Image processing unit 8, which processes the image data obtained by the CCD 7; display unit 26, which displays the image data processed by the image processing unit 8; The processing results control the stage 2, the DMD 4, and the zoom optical system 9 described later.

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PUM

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Abstract

The invention provides a laser processing device, which can prevent deterioration of DMD or optical fiber, and can simply change strength of laser irradiating a processed object to carry out laser processing. The laser processing device (1) comprises: a laser source (3) which generates the laser irradiating the processed object (A); a space modulation member (4) which is arranged on a position conjugated with the processed object (A) and shapes the laser from the laser source (3) so that the laser irradiates the processed object (A) by expected positions and shapes; and an irradiating optical system (5) which causes the laser shaped by the space modulation member (4) to irradiate the processed object (A) and is provided with a zoom optical system (9) continuously changing multiplying power of the laser.

Description

technical field [0001] The present invention relates to a laser processing device, and particularly to a laser processing device for correcting defects in patterns formed on substrates such as glass substrates for liquid crystal panels. Background technique [0002] Conventionally, there is known a laser repair device that uses laser light to correct defects generated on substrates such as glass substrates for liquid crystal panels (for example, refer to Patent Document 1). [0003] This laser repair device extracts defects on the substrate by image processing the image of the substrate captured by the imaging device, and compares the number placed at the position conjugate (conjugated) with the substrate to be irradiated with laser light according to the shape of the defect. Micromirror device (DMD) is controlled so that the substrate is irradiated with laser beams that match the shape and position of the defect, enabling accurate and rapid correction even of complex-shaped...

Claims

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Application Information

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IPC IPC(8): B23K26/06G02B27/00G02F1/13B23K26/073B23K26/00H01L21/3205H01L21/768H01L23/522H01S3/00
CPCB23K26/032B23K26/062B23K26/0869B23K26/50
Inventor 赤羽隆之
Owner OLYMPUS CORP