Transparent conductive film production method

A technology of transparent conductive film and transparent substrate, which is applied in the direction of electrical digital data processing, input/output process of data processing, ion implantation plating, etc. The effect of over-rate and low sheet resistance
CN101429640AInactive Publication Date: 2009-05-13北京东方新材科技有限公司

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
北京东方新材科技有限公司
Publication Date
2009-05-13
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a preparation method for a transparent conductive film. Through the deposition on a transparent base plate in a physical vapor deposition mode, the preparation method prepares a multilayer film consisting of at least a transparent conductive film layer with a high refractive rate and at least a transparent conductive film layer with a low refractive rate; and the transparent conductive film layers are alternated. The visible light transmission rate of the transparent conductive film is improved through the multilayer film consisting of alternated high-refractive-rate films and low-refractive-rate films. Moreover, the multilayer transparent conductive film can have greater thickness and can have lower square resistance under the condition of higher resistivity.
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Description

technical field

[0001] The invention relates to a preparation method of a transparent conductive film with low sheet resistance and high visible light transmittance. Background technique

[0002] Transparent conductive films are widely used in touch screens, liquid crystals and other fields. The requirement for the transparent conductive film is that the sheet resistance should be as low as possible, and the average transmittance in the visible light range should be as high as possible.

[0003] The substrate used for the transparent conductive film is generally glass or organic thin film, and its refractive index is between 1.5-1.6. Most of the common transparent conductive films have a high refractive index, such as ITO (In 2 o 3 : Sn) is 1.9, IZO (Zn 2 In 2 o 5 ) is 2.4. CAO with lower refractive index (CuAlO 2 ) is 1.54, but the problem of CAO is that the resistivity is too high and high-temperature annealing is required, so it is difficult to realize industriali...

Claims

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