Method for improving vacuum ultraviolet scaling light source stability
A vacuum ultraviolet and stability technology, used in material analysis, measuring devices, instruments, etc. by optical means, can solve the problems of deuterium lamp radiation intensity attenuation, thickness increase, etc., to improve radiation stability and high-precision radiation determination. target effect
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[0012] The present invention is described in further detail below in conjunction with the embodiment given with accompanying drawing.
[0013] refer to figure 1 , a method for improving the stability of the vacuum ultraviolet calibration light source is to set a tubular liquid nitrogen cooling screen 3 coaxial with the outgoing light beam at the outer end of the exit window of the standard light source chamber 2 in the vacuum chamber 1 to reduce the light source exit window. The temperature of the region increases the vacuum in the region, thereby reducing the number of contaminant molecules near the exit window.
[0014] refer to figure 2 , the tubular liquid nitrogen cooling panel 3 is composed of an inner tube 3.1, an outer tube 3.2, and a spiral tube 3.3 arranged between the inner tube 3.1 and the outer tube 3.2; the inlet end 4 of the spiral tube 3.3 is connected to the liquid nitrogen storage tank 10 is communicated through the pipeline 7, and the outlet port 5 is com...
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