Micro scroll vane and method for producing micro scroll vane substrates

Abstract

The invention relates to a method for manufacturing a micro scroll blade and a micro scroll substrate. The method for manufacturing the micro scroll blade comprises the following steps: a, using an SOI silicon chip as an initial material; b, nonisotropically etching the silicon chip to form a curve and a scroll blade; and c, stopping etching on a silicon dioxide layer on the silicon chip. The method for manufacturing the micro scroll substrate comprises the following steps: a, using the SOI silicon chip as the initial material; b, deeply etching the silicon chip on the front to form a blade; c, stopping unidirectional etching on a silicon dioxide film layer; and d, etching the silicon chip from the back by deep reaction plasma, and stopping etching on the silicon dioxide layer. The micro scroll blade is a micro scroll wall.

Description

[0001] The invention application is a divisional application of the original application;

[0002] The name of the original application is: "Micro-machined scroll compressor and related technologies"; the application number is: 200510080192.2; the application date is: July 4, 2005 technical field

[0003] The invention relates to the micro-machining technology of a micro-electromechanical system, in particular to a manufacturing method of a micro-scroll blade and a micro-scroll substrate in a micro-scroll device. Background technique

[0004] The concept of the scroll compressor was proposed by Creux in 1905. Due to the need for nearly perfect conjugated helix design and processing, the error must be controlled within a few microns. Therefore, until the application of computer-controlled precision machining in the 1970s, it could not be put into practice for a long time. In addition to the aforementioned manufacturing difficulties, design issues such as wear and leakage pre...

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