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33results about How to "Any size" patented technology

Depth aperture internal diameter measurement device

The invention discloses a depth aperture internal diameter measurement device, comprising a tapered block, a sleeve, three measurement rods, a spring, a push rod, a sleeve rod, a thread sleeve rod, a three-claw chuck and an internal diameter dial indicator. The conical surface of the tapered block is uniformly provided with three sliding grooves which are formed along the generatrix direction of the tapered block; the included angle between each sliding groove and the axis of the tapered block is 45 degree; the wall of the sleeve is provided with three through holes which are uniformly distributed along the circumference; three measurement rods pass through the through hole in the wall of the sleeve; and one end of the measurement rod is clamped inside a sliding groove. In the invention, the included angle between the sliding groove and the axis of the tapered block is 45 degrees and the displacement of the measurement rod along the radial direction is turned into an axial direction, which avoids the intermediate transfer between the levers in the traditional measurement, has more accurate measurement and can measure the maximum and minimum diameter of any cross section.
Owner:NANJING COLLEGE OF INFORMATION TECH

Internal star wheel overrun clutch

The invention discloses an internal star wheel overrun clutch. The internal star wheel overrun clutch comprises an outer ring, an inner ring and rolling columns, wherein wedge grooves are arranged on an outer circle of the inner ring, and meshing spaces used for meshing or separating the rolling columns are jointly formed by the wedge grooves and the inner circle of the outer ring. The internal star wheel overrun clutch further comprises supporting shafts, and the supporting shafts are arranged correspondingly to the rolling columns one by one in the circumferential direction, are detachably fixed relative to the inner ring and at least in the circumferential direction and provided with elastic pieces used for applying pretightening force towards to the meshing direction to the rolling columns. Since the supporting shafts which are detachably fixed relative to the inner ring and at least in the circumferential direction are utilized to apply the pretightening force to the rolling columns, and the wedge grooves used for forming the meshing spaces are arranged on an internal star wheel, the internal star wheel overrun clutch is directly shaped from forging, processing process is simplified, working efficiency is improved, and processing cost is lowered; adjustment to the rolling columns in the circumferential direction during processing is possible, processing and assembling accuracy is guaranteed, service life is prolonged, and transmission effect is guaranteed; and radial size of the internal star wheel overrun clutch in above structure is not limited, and bearing capability is improved.
Owner:SOUTHWEST UNIV +1

Bipolar plate of redox flow battery

The invention discloses a bipolar plate of a redox flow battery. The bipolar plate mainly comprises three components, namely engineering plastic side frames, a conductive bipolar plate running through the side frames and a gasket clamped between the two side frames, wherein the engineering plastic side frames are made of engineering plastic with better corrosion resistance, a flow passage for prolonging the contact distance between electrolyte and conductive graphite is engraved at an inlet and outlet, and the electrolyte can enter into and exit from the battery via the flow passage; the conductive bipolar plate adopts a high-density graphite plate, and diversion grooves which are suitable for distribution of the electrolyte of the redox flow battery are engraved on the two sides of the graphite plate; the gasket is made of the engineering plastic with better corrosion resistance, the inlet and outlet which is consistent with that on the side frames is engraved on the gasket, and the three components are bonded through silicon rubber and other glue with the better corrosion resistance to form the sandwich bipolar plate: the graphite bipolar plate and the gasket are arranged in the middle, and the two side frames are arranged on the upper side and the lower side. The bipolar plate disclosed by the invention can be suitable for the redox flow batteries taking graphite felts as electrodes and taking carbon cloth as the electrodes.
Owner:SHANGHAI INST OF SPACE POWER SOURCES

Hollow carbon nano-particles and wave-absorbing material prepared therefrom

The invention provides hollow carbon nano-particles and a wave-absorbing material prepared therefrom. A preparation method of the hollow carbon nano-particles comprises the steps of mixing aniline, pyrrole, a non-ionic surface active agent and water to obtain a first solution; carrying out ice bath on an ammonium persulfate solution and adding the ammonium persulfate solution to the first solution to obtain a second solution; reacting the second solution, carrying out suction filtration, washing and freeze drying to obtain a head product; and carrying out carbonization treatment on the head product to obtain the hollow carbon nano-particles. A preparation method of the wave-absorbing material comprises the steps of adding graphene, the hollow carbon nano-particles and polypropylene to a torque rheometer for banburying to obtain a mixture; and carrying out hot pressing and cold pressing on the mixture to obtain the wave-absorbing material. By adopting the graphene and the hollow carbon nano-particles as wave-absorbing media and polypropylene as a carrier, the prepared wave-absorbing material can reach the effective absorption effect on an electromagnetic wave, and meanwhile, a series of advantages of low density and fatigue resistance of the polypropylene material are also integrated.
Owner:PETROCHINA CO LTD +1

Stereoscopic surface woodgrained ceramic tile, stereoscopic surface woodgrained ceramic tile emboss effect glaze layer and decoration technology

InactiveCN109291723AGood printing performance and firing performanceEasy to operateSpecial ornamental structuresCalciteCeramic glaze
The invention relates to a stereoscopic surface woodgrained ceramic tile, a stereoscopic surface woodgrained ceramic tile emboss effect glaze layer and a decoration technology. The ceramic tile is composed of a green body layer, a cover glaze layer, an emboss effect glaze layer, a pattern decoration layer and a surface protective glaze layer which are sequentially compounded. The stereoscopic surface woodgrained ceramic tile emboss effect glaze layer comprises the following materials including, by weight, 2.5-3 parts of zinc oxide, 20-30 parts of feldspar, 15-20 parts of frit, 10-12 parts of washed kaolin, 8-10 parts of calcite, 8-10 parts of burning talc and 20-30 parts of home-made quartz. The decoration technology comprises the steps that (1) long-strip-shaped green bodies are obtainedby pressing woodgrained brick powder, the surfaces of the green bodies are coated with cover glaze, and formulated emboss effect glaze materials are printed on the surfaces of the green bodies, coatedwith the cover glaze, in a rubber covered roller engraving mode; (2) decoration is performed by means of ink jet patterns, and the ink jet patterns cover the glaze surface and the printed emboss effect glaze on the whole; and (3) the green bodies are coated with clear protective glaze, and then kiln firing is performed.
Owner:DONGGUAN CITY WONDERFUL CERAMICS IND PARK +3

Infrared rapid heat-treatment cavity for semiconductor chip with movable heat baffle

InactiveCN101409228AWide heating temperature rangeFastSemiconductor/solid-state device manufacturingInfraredProcess equipment
The invention relates to a semiconductor plate infrared fast heat treatment cavity with a movable thermal baffle, belonging to the technical field of the technological device for manufacturing an ultra large scale integrated circuit and a semiconductor. The heat treatment cavity comprises a flat rectangular double-layer quartz cavity, and an infrared heating cavity and an infrared reflection plate which are fixed between an inner quartz cavity and an outer quartz cavity. The front end of the inner quartz cavity extends into the outer quartz cavity. The front ends of the inner quartz cavity and the outer quartz cavity are provided with a sealing cavity cover and a sealing valve thereof. The heat treatment cavity also comprises a mechanical hand which is provided with a quartz plate support fixedly, and a drive mechanism. The movable thermal baffle is also arranged outside the double-layer quartz cavity. The thermal baffle can extend into a gap between the external wall of the inner quartz cavity and the internal wall of a flat rectangular infrared heating cavity from the back end of the double-layer quartz cavity along the direction of axis of the double-layer quartz cavity. The heat treatment cavity of the invention can ensure that a semiconductor plate is heated or cooled fast and realize actual spike annealing. The heat treatment cavity heats the semiconductor plate with uniform temperature within wide range; the heated semiconductor plate has high heating rate and cooling rate; and the semiconductor plate has any size and high production efficiency.
Owner:中国电子信息产业集团有限公司 +2

Micro scroll vane and method for producing micro scroll vane substrates

The invention relates to a method for manufacturing a micro scroll blade and a micro scroll substrate. The method for manufacturing the micro scroll blade comprises the following steps: a, using an SOI silicon chip as an initial material; b, nonisotropically etching the silicon chip to form a curve and a scroll blade; and c, stopping etching on a silicon dioxide layer on the silicon chip. The method for manufacturing the micro scroll substrate comprises the following steps: a, using the SOI silicon chip as the initial material; b, deeply etching the silicon chip on the front to form a blade; c, stopping unidirectional etching on a silicon dioxide film layer; and d, etching the silicon chip from the back by deep reaction plasma, and stopping etching on the silicon dioxide layer. The micro scroll blade is a micro scroll wall.
Owner:俞度立

Image-type device and method for quantitative determination of infrared reflectivity and transmissivity

The invention provides an image-type device and a method for quantitative determination of infrared reflectivity and transmissivity. The method comprises firstly calibrating the reflectivity and the transmissivity of calibration cards with a plurality of different reflectivity or transmissivity, secondly collecting reflected and transmitted images of the calibration cards and to-be-detected objects under illumination of infrared LED light sources, and performing linearity interpolation in accordance with the reflectivity values and the transmissivity values of the calibration cards to obtain the reflectivity values and the transmissivity values of the to-be-detected objects at any positions in an imaging area, thereby realizing the quantitative determination of the reflectivity and the transmissivity. According to the invention, the above detection can be carried out for prints printed with infrared ink or white watermark, and thus printing quality can be effectively controlled. The method and the device are convenient and fast, flexible in function, and strong in expansibility, and can adjust optical devices and software configuration of host computers for different applications, thereby achieving detection requirements.
Owner:CHINA BANKNOTE SECURITY PRINTING TECH RES INST CO LTD +1

Device for photocatalytically degrading exhaust gas by electrodeless excimer lamp

ActiveCN104474885AChange luminous intensityChange luminous efficiencyDispersed particle separationCoaxial lineEngineering
The invention discloses a device for photocatalytically degrading exhaust gas by an electrodeless excimer lamp. A used reactor comprises three quartz medium layers, an inner electrode, an outer electrode and a high-voltage power supply. The three quartz medium layers comprise a first quartz tube, a second quartz tube and a third quartz tube which are coaxial and are sequentially arranged from inside to outside; the internal cavity of the first quartz tube is a reaction region III; a closed annular cavity is formed between the second quartz tube and the first quartz tube and serves as a gas filled region II; a reaction region I is formed between the third quartz tube and the second quartz tube. During the photocatalytic degradation of the exhaust gas, gas of the gas filled region II is excited to generate excimer UV light which radiates towards the direction of the reaction region I and the direction of the reaction region III, and the exhaust gas to be degraded fully passes through the reaction region I or reaction region III or enters the reaction region I and the reaction region III in a divided-flow manner and is degraded under the action of excimer ultraviolet radiation.
Owner:江苏龙环环境科技有限公司

Three-layer solid board

The invention relates to the technical field of furniture materials, and discloses a three-layer solid board and a preparation method thereof. The three-layer solid board comprises an upper face plate, a core plate and a lower face plate which are sequentially in glue joint from top to bottom. The upper face plate and the lower face plate comprise a plurality of saw-cutting single plates. Bonding parts are arranged on the two sides of each single plate, and the single plates are in glue joint through the bonding parts to form the upper face plate and the lower face plate. The core plate is formed by splicing a plurality of saw-cutting wood strips. The three-layer solid board changes the limit that a traditional three-layer solid board can not be used as furniture materials. According to the produced three-layer solid board, the surface gaps of the face plates are small, glue lines are avoided, mechanical strength is high, the product structure is stable, dimension limits are avoided, splicing is of no need in practical using, using steps are saved, and using efficiency is improved. The three-layer solid board is very suitable for being used as furniture materials.
Owner:刘秀萍

Preparation method and application of dipotassium tetradiphosphate strontium crystal

The invention relates to a preparation method of dipotassium tetradiphosphate strontium crystal. The method comprises the steps of burdening a compound containing K, Sr and P at the molar ratio of 2:1:1 and mixing evenly, carrying out pre-sintering and sintering, heating the mixture in a crucible until melting, and keeping a constant temperature higher than a melting point temperature for 1-50h to prepare a melt; cooling the melt to the temperature which is 1-5 DEG C higher than the melting point and growing the dipotassium tetradiphosphate strontium crystal in the melt by adopting a kyropoulos method or a czochralski method. The crystal can be used for preparing a nonlinear optical device, the nonlinear optical device comprises a device, and the device comprises at least one dipotassium tetradiphosphate strontium crystal.
Owner:NANKAI UNIV

Metal bone cement, porous metal microspheres and preparation method of porous metal microspheres

The invention relates to metal bone cement, porous metal microspheres and a preparation method thereof, the metal bone cement is used for bone defect repair, the metal bone cement is prepared by mixing the porous metal microspheres and hydrogel, the volume ratio of the porous metal microspheres to the hydrogel is 0.1-2, the porosity of the metal bone cement is 50-90%, and the metal bone cement is degradable and injectable; the shape of the porous metal microsphere is a regular or irregular sphere, the interior of the porous metal microsphere is of an internally-communicated porous cell structure, the irregular sphere comprises an ellipsoid and a polyhedron structure, and the porous cell structure comprises a beam-column cell structure and a surface cell structure. The invention also provides a preparation method of the porous metal microsphere. The porous metal microspheres are fine in structure, free of cracks, good in fluidity and good in biocompatibility and can promote adhesion, proliferation or differentiation of osteoblasts in the porous metal microspheres, the injectability of the porous metal microspheres is achieved through the metal bone cement, and the mechanical property and stability of the bone filling material are improved.
Owner:UNIV OF SCI & TECH BEIJING

Embedded one-way valve

The invention provides an embedded one-way valve. The embedded one-way valve is assembled and connected with a main machine and comprises a spring seat, a spring, a sealing ball, a valve body and a guide sleeve, the spring seat is in a cup body shape, the opening of the spring seat is opened outwards, and a through hole is formed in the cup bottom surface of the spring seat; and the valve body isthe hollow cylinder body, the inner wall of the valve body comprises a step part protruding inwards in a radial mode, the spring seat is fixedly connected with one end of the valve body, after connecting, a storing space is formed by the spring seat and the step part, the spring and the sealing ball are placed in the storing space, the sealing ball is propped against the step part under the tension action of the spring, the side, facing the sealing ball, of the step part is provided with a conical surface, the guide sleeve is of a hollow cylinder and is in riveting connection with the other end of the valve body. The one-way valve has the simple and compact structure, is designed into a built-in type, placed in the main machine, and improves the assembly speed of the main machine.
Owner:ZHEJIANG EASUN PNEUMATIC SCI & TECH

Preparation method of large-area ordered quantum dot film based on Langmuir technology

PendingCN113416546APrecise and controllable film thicknessSimple processLuminescent compositionsThin membraneLangmuir trough
The invention provides a preparation method of a large-area ordered quantum dot film based on a Langmuir technology. The method comprises the following steps: spreading a quantum dot solution dispersion liquid in a Langmuir groove to form a single layer, forming a large-area highly ordered film by controlling the extrusion of a sliding barrier on quantum dots, and finally transferring the film to a substrate with any material and any size. The method has the advantages of low preparation cost, neat and compact film arrangement, accurate film thickness control, easy large-area film formation, capability of depositing on any substrate and the like.
Owner:FUZHOU UNIVERSITY

Three-coordinate multi-station automatic measuring device and method

ActiveCN109059820AContinuously adjustable widthArbitrary arrangementMeasurement devicesMeasurement deviceEngineering
The invention belongs to the field of mechanical automation measuring, and relates to a three-coordinate multi-station automatic measuring device and method. The three-coordinate multi-station automatic measuring device comprises an upper computer control device and an automatic feeding device. The upper computer control device is connected with the automatic feeding device to achieve control overthe automatic feeding device. The automatic feeding device comprises a fixture device, a transmission device, a positioning device and an auxiliary device. The positioning device is fixed on the fixture device; the positioning device can precisely position the fixture device; the fixture device is in sliding connection with the transmission device; and the transmission device is fixed to the auxiliary device. According to the three-coordinate multi-station automatic measuring device and method, the width of a clamping plate part of the fixture device is adjustable; the moving distance and theposition can be arranged randomly; the moving speed is continuously adjustable; by combining with a three-coordinate machine, the measuring angle is continuously adjustable, the measuring speed is continuously adjustable, the dimensions of parts are measured randomly; and therefore integrated automatic measuring to any pose positions and parts with any dimensions is achieved.
Owner:JIANGNAN UNIV

Mobile phone casing

The invention discloses a mobile phone casing, relates to the field of mobile phone casings, and relates to the field of casings of iPad Pro flat computers, mobile computer devices and wearable electronic devices. A hollow convex part is arranged on the outer surface of the mobile phone casing. The convex part is provided with more than one vent hole, or the convex part contacts the back of a mobile phone, and the vent hole is arranged in the casing surface of the back, which is corresponding to the vent hole, of the mobile phone casing. The size of the vent hole is not limited, and the shapeof the vent hole is arbitrary. The size and the number of the convex part are not limited, and the shape is arbitrary. The convex part becomes a partial accommodating cavity. An aroma article can be placed in the cavity. The mobile phone casing sleeves the mobile phone. The aroma is emitted from the vent hole, which refreshes people. The individual need of people is met.
Owner:王勇

Planar array type shear force touch sensor and shear force parameter detection method

The invention discloses a planar array type shear force touch sensor and a shear force parameter detection method. The sensor comprises piezoelectric polymers, an upper-layer substrate and a lower-layer substrate, wherein the piezoelectric polymer are identical and are arranged in an array manner, and a distance between every two adjacent piezoelectric polymers in all directions is the same; all the piezoelectric polymers are uniformly fixed between the upper-layer substrate and the lower-layer substrate; and a conductive material is coated on positions, which are in contact with the piezoelectric polymers, of the lower surface of the upper-layer substrate and the upper surface of the lower-layer substrate, and the piezoelectric polymers are connected to an external charge amplifier through the conductive material. According to the method, the size, direction and action position of the shearing force can be detected at the same time based on the planar array type shear force touch sensor. The whole sensor adopts a planar structure, and is simple in structure, high in sensitivity, short in manufacturing period, stable in performance, long in service life and easy to popularize.
Owner:HEBEI UNIV OF TECH

Image-type device and method for quantitative determination of infrared reflectivity and transmissivity

The invention provides an image-type device and a method for quantitative determination of infrared reflectivity and transmissivity. The method comprises firstly calibrating the reflectivity and the transmissivity of calibration cards with a plurality of different reflectivity or transmissivity, secondly collecting reflected and transmitted images of the calibration cards and to-be-detected objects under illumination of infrared LED light sources, and performing linearity interpolation in accordance with the reflectivity values and the transmissivity values of the calibration cards to obtain the reflectivity values and the transmissivity values of the to-be-detected objects at any positions in an imaging area, thereby realizing the quantitative determination of the reflectivity and the transmissivity. According to the invention, the above detection can be carried out for prints printed with infrared ink or white watermark, and thus printing quality can be effectively controlled. The method and the device are convenient and fast, flexible in function, and strong in expansibility, and can adjust optical devices and software configuration of host computers for different applications, thereby achieving detection requirements.
Owner:CHINA BANKNOTE SECURITY PRINTING TECH RES INST CO LTD +1

Forming device and method suitable for ultra-high pressure strengthening of square wood

The invention discloses a shape fixing device suitable for square wood ultrahigh pressure strengthening. The shape fixing device is formed by four fixing parts, wherein each fixing part comprises a chain plane and a flat vortex coil spring assembly, and the four flat vortex coil spring assemblies are arranged in a rectangular mode; each chain plane is formed by a head connecting plate, at least two middle connecting plates and a tail end connecting plate which are fixedly connected in sequence; each flat vortex coil spring assembly comprises an outer shell and a flat vortex coil spring, and the head connecting plate of each chain plane is fixedly connected with the tail end of the corresponding flat vortex coil spring; each outer shell is provided with an opening communicating with an inner cavity of the outer shell, and each tail end connecting plate can penetrate through the opening from the cavity of the corresponding outer shell and reach the outer side of the corresponding outer shell; the tail end connecting plate of each chain plane is fixedly connected with the outer shell of the fixing part adjacent to the chain plane in sequence; the four flat vortex coil spring assemblies form a cubic channel. The invention further provides a shape fixing method suitable for square wood ultrahigh pressure strengthening through the shape fixing device.
Owner:ZHEJIANG UNIV

Method for preparing semi-solid blank material by using liquides line die stamping process

The method for preparing semisolid blank material by using liquidus line die stamping process includes the following steps: in melting furnace mixing and melting alloy components according to the requirements, then injecting the above-mentioned mixture material into heat-insualting lalde, regulating temp. to make it be 3-5 deg.C higher than alloy liquidus line, after the internal temp. of heat-insulating ladle is uniformized to the required temp., injecting the melt being in heat-insulating ladle into die cavity, applying mechanical static pressure and retaining pressure so as to obtain the fine semisolid blank material and product with spherocrystal structure.
Owner:HARBIN INST OF TECH

Inner star wheel overrunning clutch

The invention discloses an internal star wheel overrun clutch. The internal star wheel overrun clutch comprises an outer ring, an inner ring and rolling columns, wherein wedge grooves are arranged on an outer circle of the inner ring, and meshing spaces used for meshing or separating the rolling columns are jointly formed by the wedge grooves and the inner circle of the outer ring. The internal star wheel overrun clutch further comprises supporting shafts, and the supporting shafts are arranged correspondingly to the rolling columns one by one in the circumferential direction, are detachably fixed relative to the inner ring and at least in the circumferential direction and provided with elastic pieces used for applying pretightening force towards to the meshing direction to the rolling columns. Since the supporting shafts which are detachably fixed relative to the inner ring and at least in the circumferential direction are utilized to apply the pretightening force to the rolling columns, and the wedge grooves used for forming the meshing spaces are arranged on an internal star wheel, the internal star wheel overrun clutch is directly shaped from forging, processing process is simplified, working efficiency is improved, and processing cost is lowered; adjustment to the rolling columns in the circumferential direction during processing is possible, processing and assembling accuracy is guaranteed, service life is prolonged, and transmission effect is guaranteed; and radial size of the internal star wheel overrun clutch in above structure is not limited, and bearing capability is improved.
Owner:SOUTHWEST UNIV +1

A three-coordinate multi-station automatic measuring device and method

ActiveCN109059820BContinuously adjustable widthArbitrary arrangementMeasurement devicesControl engineeringMachine
The invention belongs to the field of mechanical automation measuring, and relates to a three-coordinate multi-station automatic measuring device and method. The three-coordinate multi-station automatic measuring device comprises an upper computer control device and an automatic feeding device. The upper computer control device is connected with the automatic feeding device to achieve control overthe automatic feeding device. The automatic feeding device comprises a fixture device, a transmission device, a positioning device and an auxiliary device. The positioning device is fixed on the fixture device; the positioning device can precisely position the fixture device; the fixture device is in sliding connection with the transmission device; and the transmission device is fixed to the auxiliary device. According to the three-coordinate multi-station automatic measuring device and method, the width of a clamping plate part of the fixture device is adjustable; the moving distance and theposition can be arranged randomly; the moving speed is continuously adjustable; by combining with a three-coordinate machine, the measuring angle is continuously adjustable, the measuring speed is continuously adjustable, the dimensions of parts are measured randomly; and therefore integrated automatic measuring to any pose positions and parts with any dimensions is achieved.
Owner:JIANGNAN UNIV

Rapid and simple preparation method of mechanical expansion discoloration mechanism device

The invention discloses a rapid and simple preparation method of a mechanical expansion discoloration mechanism device. The device consists of a hollow pipe, a double-layer elastic film, a ground color filler and a piston; the double-layer elastic film fixedly wraps one end of the hollow pipe; the hollow pipe is filled with the ground color filler, and the piston is arranged at the other end of the hollow pipe. The device disclosed by the invention is low in cost, simple to prepare, easy to operate and controllable; equipment used in the method is simple, and the color composition, the structure and the performance of the light-operated double-layer elastic film and the ground color filler material can be controlled as required. The device has the characteristics of stable structure, quickresponse, full chromatography, large size, repeatable discoloration and the like. The color changing device is mainly used in the fields of color changing display, advertisements, military camouflage, decoration and the like.
Owner:HUAZHONG UNIV OF SCI & TECH

Infrared rapid heat-treatment cavity for semiconductor chip with movable heat baffle

The invention relates to a semiconductor plate infrared fast heat treatment cavity with a movable thermal baffle, belonging to the technical field of the technological device for manufacturing an ultra large scale integrated circuit and a semiconductor. The heat treatment cavity comprises a flat rectangular double-layer quartz cavity, and an infrared heating cavity and an infrared reflection plate which are fixed between an inner quartz cavity and an outer quartz cavity. The front end of the inner quartz cavity extends into the outer quartz cavity. The front ends of the inner quartz cavity and the outer quartz cavity are provided with a sealing cavity cover and a sealing valve thereof. The heat treatment cavity also comprises a mechanical hand which is provided with a quartz plate supportfixedly, and a drive mechanism. The movable thermal baffle is also arranged outside the double-layer quartz cavity. The thermal baffle can extend into a gap between the external wall of the inner quartz cavity and the internal wall of a flat rectangular infrared heating cavity from the back end of the double-layer quartz cavity along the direction of axis of the double-layer quartz cavity. The heat treatment cavity of the invention can ensure that a semiconductor plate is heated or cooled fast and realize actual spike annealing. The heat treatment cavity heats the semiconductor plate with uniform temperature within wide range; the heated semiconductor plate has high heating rate and cooling rate; and the semiconductor plate has any size and high production efficiency.
Owner:中国电子信息产业集团有限公司 +2
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