Infrared rapid heat-treatment cavity for semiconductor chip with movable heat baffle
A technology of rapid heat treatment and thermal baffles, which is applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems such as inability to quickly cool down, inability to achieve temperature rise and fall, and temperature control system inability to accurately control temperature, etc., to achieve high productivity , Fast heating rate and cooling rate, wide heating temperature range
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0010] The infrared rapid heat treatment chamber with movable heat shield semiconductor chip proposed by the present invention is further described as follows in conjunction with the accompanying drawings and embodiments:
[0011] The overall structure of the embodiment of the movable heat shield semiconductor chip infrared rapid heat treatment chamber embodiment proposed by the present invention is as follows figure 2 As shown, it mainly includes: a flat rectangular double-layer quartz cavity composed of a quartz inner cavity 21 and a quartz outer cavity 15 sleeved outside the inner cavity, and a flat rectangular graphite heating cavity 13 fixed between the quartz inner cavity and the outer cavity 15 (or adopt graphite material to outsource the silicon carbide film, or adopt the infrared heating cavity that high-temperature-resistant and anti-oxidation alloy material is made.) and infrared reflector 14, be surrounded with radio frequency induction coil 16 on the outside of qu...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com