Translational overturn type automatic conveying device for silicon wafer

Abstract

A shift tilting-type wafer automatic transmission device overcomes the shortcomings that the prior art can not make complex movements in the narrow space of the manufacturing process; the wafer automatic transmission device comprises a machine frame, a feeding platform, a bellows body and an arm mechanism and is technically characterized in that a lower arm of the arm mechanism is connected with a grasping mechanism through a shift mechanism and a tilting mechanism which are assembled together; an assembly gear connecting rod transmission mechanism is used to drive the grasping mechanism to rotate around the axis; a grasping motor of the grasping mechanism drives a gripping claw to move back and forth; and a positioning mechanism on the grasping mechanism is provided with an adjustable positioning block. The device has rational design and stable transmission and running in the production process, as well as flexible and reliable movement; the device expands the scope of application and can realize bilateral shift and tilting of a wafer box while the device completes the automatic wafer transmission in the horizontal or vertical state of the wafer so as to fully realize the automatic transmission in a small space in which the center distance of the parallelly arranged process equipment is less than the center distance of the transmission equipment; moreover, the device can flexibly stop in the face of external interference to achieve the precisely controlled transmission effect.

Description

technical field The invention relates to a wafer conveying device. In particular, a standard mechanical interface (SMIF for short) wafer cassette loading and unloading operation has a reasonable structural design, and the transmission operation between processes is stable, and the upper and lower lifting of the wafer cassette, forward and backward translation, The four directions of flipping and left and right translation are more flexible and reliable, which expands the scope of application of the automatic translation device for translation and flipping wafers. Background technique Currently, in the semiconductor manufacturing process, wafer handling is critical to IC manufacturing. In order to ensure the quality of wafers when they are transported between different processes and avoid dust particles or other contamination of wafers, more and more transport work uses standard transport containers, that is, standard mechanical interface (SMIF for short) )technology. For ...

AI Technical Summary

Problems solved by technology

The object of the present invention is to provide a kind of translating and flipping type wafer automatic transfer device, it can not only inherit the advantages of clean microenvironment provided by the isolation technology in the SMIF in the prior art, but also can effectively overcome its structural limitation, cannot It is suitable for shortcomings such as complicated actions in the narrow space of the process equipment. The structure of the device is designed reasonably, the transmission between the processes is stable, the action is more flexible and reliable, and the scope of application is expanded, so that it can realize the wafer cassette in the range of 0-90 degrees. Turn over and set the tilt angle at will to complete the automatic transfer of wafers in horizontal or vertical state, and at the same time realize the left and right translation of the wafer cassette to adapt to the narrow center distance between the process equipment set up in parallel and smaller than the center distance of the transmission equipment Automatic transmission is realized in all spaces, and it can be flexibly stopped when encountering external interference, so as to achieve a precisely controlled transmission effect