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Six-freedom precise positioning platform

A precision positioning, degree of freedom technology, applied in the direction of workbench, manufacturing tools, exposure device of photo-plate making process, etc., can solve the problem of troublesome control algorithm implementation, achieve the effect of simple structure, increased stability, and simple decoupling control

Active Publication Date: 2010-12-29
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The stroke of this kind of micro-motion table is limited by the stroke of the driver, and decoupling control of six actuators in six degrees of freedom is required. The control algorithm is quite troublesome to implement

Method used

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  • Six-freedom precise positioning platform

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] figure 2 Shown is a three-dimensional schematic view of the structure of the 333-type micro-motion table in Embodiment 1 of the present invention. Such as figure 2 As shown, the structure of the micro-moving platform according to Embodiment 1 of the present invention includes a moving platform and three connecting legs with the same structure. Three drivers are required at the bottom of each connecting leg, and the three drivers can realize linear movement up and down, and jointly drive the top of the connecting leg to move within a spherical crown range. Three connected legs drive the moving platform to achieve six degrees of freedom of motion.

[0034] image 3 Shown is a schematic plan view of the structure of the 333-type micro-motion table in Embodiment 1 of the present invention. Such as image 3 As shown, each connecting leg is connected with the moving platform on it through a ball pair. Each linear actuator is connected to the connecting leg through a b...

Embodiment 2

[0036] Figure 4a Shown is a three-dimensional schematic diagram of the structure of the 321-type micro-motion table in Embodiment 2 of the present invention. Figure 4b Shown is a schematic plan view of the structure of the 321-type micro-motion table in Embodiment 2 of the present invention. Such as Figure 4a , 4b As shown, the connection structure of the micro-moving stage in Embodiment 2 of the present invention is similar to Embodiment 1, and the difference from Embodiment 1 is that the three connecting legs are respectively driven by one, two, and three drivers, and six drivers can realize six stages of the moving platform. degrees of freedom of movement.

Embodiment 3

[0038] Figure 5a Shown is a three-dimensional schematic diagram of the structure of the 331-type micro-motion table in Embodiment 3 of the present invention. Figure 5b Shown is a schematic plan view of the structure of the 331-type micro-motion table in Embodiment 3 of the present invention. Such as Figure 5a , 5bAs shown, the connection structure of the micro-moving platform in Embodiment 3 of the present invention is similar to Embodiment 1, and the difference from Embodiment 1 is that the three connecting legs are respectively driven by one, three, and three drivers, and seven drivers can realize six stages of the moving platform. One degree of freedom motion control.

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PUM

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Abstract

The invention proposes a 6-degree of freedom precision positioning platform, comprising a substrate, an X direction long-range electric motor which is provided with a first stator and a first mover, a Y direction long-range electric motor which is provided with a second stator and a second mover, a microchecker which crosses the first stator and is provided with a movable platform, 3 supporting drive rods and piezoceramics drives, wherein, each supporting drive rod is connected with at most 3 piezoceramics drives, at least one out of the 3 supporting drive rods is connected with 3 piezoceramics drives and the total number of the piezoceramics drives connected with the 3 supporting drive rods is not less than 6. The positioning platform of the invention features simple structure and quick response speed of movement, in addition, compared with previous piezoceramics precision positioning platform, the platform of the invention improves ranges, increases the stability of the microcheckerand simplifies decoupling control; moreover, the platform of the invention can reduce vibration reduction actively.

Description

technical field [0001] The present invention relates to a six-degree-of-freedom precision positioning platform, and in particular to a six-degree-of-freedom precision positioning platform applied to a photolithography machine system. Background technique [0002] Precision positioning platform (referred to as "platform") is an important tool in the field of precision machining, and its precision reaches submicron or even nanometer level. For example, when a lithography machine manufactures a chip, it fixes the silicon wafer and the mask on two platforms respectively, so as to copy the pattern on the mask to the silicon wafer. A complete platform includes exercise table and base. The motion table can do precise displacement, and the base provides support, power and measurement means for the motion table. [0003] The existing lithography machine workpiece table mostly uses a combination of long and short-range motors to form a three-degree-of-freedom movement in a plane; to...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20B25H1/00
Inventor 马雨雷
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD