Diamond thin-film grinding method and catalyst grinding wheel thereof

Abstract

The invention discloses a method for grinding a diamond thin film, which comprises the following steps of: mixing catalytic abrasive grains and cutting abrasive grains with a bonding agent respectively; making a concentric mold, and pouring the catalytic abrasive grains and the cutting abrasive grains into mixed grains in an alternating way; placing the mold in a compressor for extruding and curing, and obtaining a catalytic grinding wheel after demoulding; and processing a workpiece with a catalytic grinding wheel, in which the friction and catalysis of the catalytic abrasive grains reduces the activation required for the graphitization of a CVD diamond thin film, when the catalytic abrasive grains are worn away, the cutting abrasive grains perform graphitization-removing grinding and polishing of non-diamond carbon generated by the graphitization to realize the precision grinding and polishing of the surface of the diamond thin film. The catalytic grinding wheel applicable to the method consists of the catalytic abrasive grains and the cutting abrasive grains. The method has the advantages of strong applicability, compact structure, high machining efficiency and precision, low cost, small negative effect, convenient use and the like.

Description

Diamond film grinding method and catalyst grinding wheel technical field The invention mainly relates to precision processing fields such as grinding and polishing, and is especially suitable for a diamond film grinding method and a catalyst grinding wheel for CVD diamond film grinding and polishing. Background technique The mechanical grinding and polishing of CVD diamond film uses free abrasives or diamond grinding wheels to contact the surface of CVD diamond film to generate a large friction force, which will deform the diamond surface and even break the carbon bond to form debris, so as to achieve the purpose of material removal. However, the traditional method has the following disadvantages: low processing efficiency, poor microscopic surface quality, and easy to cause film rupture and damage. Contents of the invention In order to overcome the shortcomings of the existing CVD diamond film mechanical grinding and polishing process, the present invention proposes a ...

AI Technical Summary

Problems solved by technology

However, the traditional method has the following disadvantages: low processing efficiency, poor microscopic surface quality, and easy to cause film rupture and damage

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