Electrical property detecting and analyzing system of micromachine sensing device and method thereof
A technology of a sensing device and an analysis system, applied in the field of detection and analysis systems, can solve the problems of inability to measure small capacitances, slow data acquisition, easy generation of parasitic capacitance, etc., and achieve simple structure, fast data acquisition, and no The effect of easy parasitic capacitance
Active Publication Date: 2009-08-26
JIAXING NAJIE MICROELECTRONICS TECH
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Problems solved by technology
[0003] However, the existing bridge method to measure capacitance is prone to parasitic capacitance due to the parallel wiring and long lines used in the detection, and each part of this measurement method is discrete, the structure is relatively complicated, and the cost is relatively high , the stability is not high, the speed of data acquisition is slow, the measurement accuracy is low, and it cannot meet the measurement of small capacitance
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[0060] The implementation of the electrical characteristic detection and analysis system and method of the micromechanical sensing device of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0061] see figure 2 , image 3 , a micromechanical sensor device electrical characteristic detection and analysis system, including a front-end detection device 11, a data processing device 22 and a computer device 33, wherein the front-end detection device 11 includes a capacitance-to-digital conversion module 101, a D / A conversion module 102, a digital interface Module 103, first reference module 104 and second reference module 105 and test connection module 106; Data processing device 22 includes DSP module 201, memory module 202 and dot matrix display module 203; Computer device 33 includes control module 301, display module 302 and storage module 303.
[0062] The front-end detection device 11 is welded on the PCB circuit board...
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The invention discloses an electrical property detecting and analyzing system of a micromachine sensing device and a method thereof. The electrical property detecting and analyzing system comprises a front end detecting device, a data processing device and a computer device; wherein, the front end detecting device is used for detecting and transforming the corresponding differential capacitance, upper end capacitance, lower end capacitance, parasitic capacitance as well as variable voltage regulation linearity and temperature information into digital signals to be output; the data processing device is used for sending test command to the front end detecting device to lead the front end detecting device to detect, processing the digital signals transmitted by the front end detecting device, storing and displaying the results, and sending the results out; the computer device is used for sending start command to the data processing device to lead the data processing device to instruct the work of the front end detecting device, receiving and processing the detection data transmitted by the data processing device, and displaying and storing the final processing results. Therefore, the electrical property detecting and analyzing system of the micromachine sensing device and the method thereof has the advantages of simple circuit structure, low cost, high stability, rapid data acquisition and high detection accuracy.
Description
technical field [0001] The invention relates to a detection and analysis system and a method thereof, in particular to a system and a method for detection and analysis of electrical characteristics of a micromechanical sensing device. Background technique [0002] In the current capacitance measurement technology, the bridge method is often used for capacitance measurement, see figure 1 , the signal production module 1 is used to generate a test signal, the frequency range of the test signal is between 40Hz and 110Mhz, and the maximum frequency resolution is 1mHz; the output range of the signal is between 5mV and 1V. The signal production module 1 is connected to the automatic bridge balance module 2, and the automatic bridge balance module 2 is used to balance the impedance current and the measured capacitance current, and maintain the zero potential of the low potential Lp. Wherein the phase detector detects the potential, and controls the amplitude and phase so that the ...
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Inventor 薛晓军李荣宽陈庆许秋玲
Owner JIAXING NAJIE MICROELECTRONICS TECH