Three-friction stepper for juxtaposedly pushing double piezoelectrics and scanning probe microscope thereof

Abstract

The invention relates to a three-friction stepper for juxtaposedly pushing double piezoelectrics and a scanning probe microscope thereof, in particular to a piezoelectric locator comprising two piezoeThe invention relates to a three-friction stepper for juxtaposedly pushing double piezoelectrics and a scanning probe microscope thereof, in particular to a piezoelectric locator comprising two piezoetwo piezoelectrics can be arranged integrally, and a piezoelectric scanatron fixed on the base is coated outside the stepper, thus a scanning probe microscope body which can work in a small space istwo piezoelectrics can be arranged integrally, and a piezoelectric scanatron fixed on the base is coated outside the stepper, thus a scanning probe microscope body which can work in a small space isformed. The invention has small size, simple and firm structure, and large working temperature zone and driving force, is suitable for various extreme physical conditions and approaches an ideal steppformed. The invention has small size, simple and firm structure, and large working temperature zone and driving force, is suitable for various extreme physical conditions and approaches an ideal stepper.er.lectrics, a base and slide bars, wherein the two piezoelectrics which are parallel in the telescopic direction are juxtaposedly fixed and elevated on the base; the slide bars which are in sliding matclectrics, a base and slide bars, wherein the two piezoelectrics which are parallel in the telescopic direction are juxtaposedly fixed and elevated on the base; the slide bars which are in sliding match with the two piezoelectrics in the telescopic direction are provided; positive pressures which enable the slide bars and the free ends of the two piezoelectrics as well as the slide bars and the bash with the two piezoelectrics in the telescopic direction are provided; positive pressures which enable the slide bars and the free ends of the two piezoelectrics as well as the slide bars and the base to be pressed are arranged in the telescopic direction vertical to the two piezoelectrics; in the largest breakout friction to the slide bars, which is generated by the three positive pressures, anye to be pressed are arranged in the telescopic direction vertical to the two piezoelectrics; in the largest breakout friction to the slide bars, which is generated by the three positive pressures, anylargest breakout friction is smaller than the sum of other two frictions; the slide bars press the base and the free ends of the two piezoelectrics through elastic force or electromagnetic force, the largest breakout friction is smaller than the sum of other two frictions; the slide bars press the base and the free ends of the two piezoelectrics through elastic force or electromagnetic force, the

Description

Triple-friction stepper driven by bi-piezoelectric side-by-side and scanning probe microscope technical field The invention relates to a piezoelectric stepper, in particular to a three-friction stepper driven by double piezoelectric bodies side by side and a scanning probe microscope mirror made of the same, which belongs to the technical field of piezoelectric positioners. Background technique At the same time, it has nano-level positioning accuracy, millimeter-level large stroke, large working temperature range from ultra-low temperature to higher than room temperature, large driving force, small size, simple and firm structure and simple and reliable control. It is a coveted positioning tool for atomic / molecular manipulation and even subatomic structure imaging, especially in the field of nanoscience research under extreme physical conditions such as ultra-low temperature and ultra-strong magnetic field, it is even more inseparable from such an ideal positioning device. ...

AI Technical Summary

Problems solved by technology

In order to solve the problem that the existing nano-precision stepper cannot have small size, simple and firm structure, large driving force and large working temperature range at the same time, a three-friction stepper with double piezoelectric bodies pushed side by side and a three-friction stepper made of it are provided. Scanning probe microscope body capable of working in small spaces

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