Polycrystalline silicon fuzzing process by acid method
A kind of technology, silicic acid technology, applied in the field of polycrystalline silicic acid method texturing technology, can solve the problems of reducing reflectivity, the effect is not obvious, etc., to achieve the effect of reducing reflectivity and improving efficiency
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[0008] The present invention will now be described in further detail in conjunction with the accompanying drawings and preferred embodiments. These drawings are all simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, so they only show the configurations related to the present invention.
[0009] The polycrystalline silicic acid texturing process of the best implementation mode has the following processes
[0010] (1) Spraying silicon dioxide or photoresist protection particles on the surface of the silicon wafer;
[0011] (2) Carrying out texturing The silicon wafer is placed in a mixed solution of hydrofluoric acid and nitric acid for texturing, and the particles sprayed on the surface of the silicon wafer serve as an etching protective layer.
[0012] According to the specific situation, select the spraying method, the distance between the nozzle and the silicon wafer, the flow rate of the sprayed substanc...
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