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Silicon-aluminum mixture evaporation material

A technology of evaporation materials and mixtures, which is applied in vacuum evaporation coating, metal material coating process, sputtering coating, etc., can solve the problems of unstable mechanical properties and short service life, etc., and achieve good optical properties, Stable mechanical properties and long service life

Inactive Publication Date: 2010-03-10
昆山光铭光电子元件有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In high-resolution imaging systems, optical engines in photographic televisions, high-low pass filters in optical communications, high-pixel, high-brightness, high-definition camera products, and can be applied to the lens coating of advanced glasses to achieve durability High humidity and salt spray atmosphere, but the mechanical properties of the current silicon-aluminum mixture evaporation materials are not very stable, and the service life is not long

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0006] Embodiment 1: a kind of silicon-aluminum mixture evaporation material, by weight percentage, it is made up of following components: SiO 2 : 72%~85%, Al 2 o 3 : 10%~20% and Y 2 o 3 : 5% to 8%.

Embodiment 2

[0007] Embodiment 2: Take the silicon-aluminum mixture evaporation material of embodiment 1, configure its composition into SiO by weight percentage 2 : 80%, Al 2 o 3 : 15% and Y 2 o 3 : 5% silicon-aluminum mixture evaporation material. The purity of the silicon-aluminum mixture evaporation material is 99.99%, the refractive index is 1.48 (500nm), and the extinction coefficient is 2×10 -4 And the density is 2.22g / cm 3 .

Embodiment 3

[0008] Embodiment 3: Take the silicon-aluminum mixture evaporation material of embodiment 1, configure its composition into SiO by weight percentage 2 : 85%, Al 2 o 3 : 10% and Y 2 o 3 : 5% silicon-aluminum mixture evaporation material. The purity of the silicon-aluminum mixture evaporation material is 99.99%, the refractive index is 1.49 (500nm), and the extinction coefficient is 2×10 -4 And the density is 2.22g / cm 3 .

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Abstract

The invention relates to a silicon-aluminum mixture evaporation material, which mainly comprises the following components in percentage by weight: 72 to 85 percent of SiO2, 10 to 20 percent of Al2O3,and 5 to 8 percent of Y2O3. The SiO2 is combined with the Al2O3 to generate a solid solution which has good optical characteristics, and the solid solution is combined with the Y2O3 to serve as a plastic agent so that the mechanical property of the material is stable.

Description

technical field [0001] The invention relates to an evaporation coating material, in particular to a silicon-aluminum mixture evaporation material. Background technique [0002] The silicon-aluminum mixture evaporation material is a high-quality, high-humidity, high-density crystallized composite oxide. The material is evaporated on the optical lens and lens, which can improve the optical transmittance of the product and achieve a high optical image. features such as clarity. The material can be widely used in the field of high-end precision optics. In high-resolution imaging systems, optical engines in photographic televisions, high-low pass filters in optical communications, high-pixel, high-brightness, high-definition camera products, and can be applied to the lens coating of advanced glasses to achieve durability High humidity and salt spray atmosphere, but the mechanical properties of the current silicon-aluminum mixture evaporation materials are not very stable, and t...

Claims

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Application Information

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IPC IPC(8): C23C14/08C23C14/24G02B1/10
Inventor 许士荣
Owner 昆山光铭光电子元件有限公司