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Method for preparing target material

A technology of target material and base material, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of poor product uniformity, complicated process, excessive grain size, etc., and achieve good uniformity and process Simple, small grain effect

Active Publication Date: 2010-03-10
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The technical problems to be solved by the present invention are: complex process, poor product uniformity and excessive grain size in the existing target material preparation technology.

Method used

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  • Method for preparing target material

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Embodiment Construction

[0021] The inventors of the present invention found that when preparing target materials, the four-stage refining method including three-layer liquid electrolysis, segregation method, room temperature ionic liquid electrolysis and zone smelting method was used in the past to prepare ultra-pure aluminum or ultra-pure copper , the process is complicated, the processing time is long, the work efficiency is low, and the prepared ultra-pure aluminum or ultra-pure copper has problems such as poor uniformity and coarse grains.

[0022] In view of this, the inventors of the present invention conceived to improve the purification method and adopt a combination of vacuum melting and continuous casting with fewer procedures and higher efficiency to prepare the target.

[0023] The invention provides a method for preparing a target, comprising: providing a base material, and placing the base material in a vacuum melting furnace, the base material being primary aluminum or copper; placing t...

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Abstract

The invention provides a method for preparing target material, comprising the following steps of providing base material, arranging the base material in a vacuum smelting furnace, wherein the base material is primary aluminium or original copper; smelting the base material in the vacuum smelting furnace, carrying out composition analysis to the smelted metals; adding the composition elements required by the preparation of the target material according to the composition analysis result and product requirement; degasifying the smelted metals; sampling the smelted metals; carrying out product analysis; injecting the smelted metals meeting the product requirement after product analysis into a vertical crystallizer through a running channel; carrying out continuous casting; and carrying out finished product detection to the outgoing target casting, thus obtaining the target material meeting the requirement of the product. Compared with the prior art, the method has simple, stable and easily controlled process, higher production efficiency, and the prepared target material has the characteristics of good uniformity, small crystal grains, and the like.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a method for preparing a target. Background technique [0002] The target is the material used for coating. Therefore, in processes such as pulsed laser deposition or electron beam deposition to form thin films, the quality of the target has a critical impact on the quality of the deposited film. [0003] Generally, the commonly used method for preparing target materials is to use metals of a certain purity (such as primary aluminum or copper) as raw materials, and adopt a four-stage refining method including three-layer liquid electrolysis, segregation, room temperature ionic liquid electrolysis and zone smelting. Preparation of ultrapure aluminum. The segregation method, the room temperature ionic liquid electrolysis method and the regional smelting method respectively use the products produced in the previous stage as raw materials to produce ultra-pure aluminum. T...

Claims

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Application Information

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IPC IPC(8): C23C14/14C23C14/28C23C14/30C22B9/04C22B9/05C22B15/14C22B21/06B22D11/00
Inventor 姚力军潘杰王学泽钱红兵刘庆
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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