Method of producing surface acoustic wave devices by exposing X-rays in a direct writing way
A surface acoustic wave device and electron beam lithography technology, applied in the field of micro-nano processing, to achieve the effect of good width control, steep edges, and fewer process steps
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[0038] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0039] The invention adopts electron beam photolithography technology, which is an effective nano-processing method and has nano-level resolution. The present invention mainly utilizes electron beam direct writing exposure to form electronic resist concave vertical electrode patterns of interdigital transducers with a spacing of less than 500 nm on the piezoelectric substrate, and then grow metal and peel off to produce surface acoustic wave devices .
[0040] Such as figure 1 as shown, figure 1 It is a flow chart of a method for fabricating a surface acoustic wave device using electron beam direct writing exposure provided by the present invention, and the method specifically includes the following steps:
[0041] 1) ...
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