Piezoresistive double-shaft micro-accelerometer with on-chip zero offset compensation and manufacturing method thereof
A micro-accelerometer and accelerometer technology, which is applied in the direction of acceleration measurement using inertial force, photoengraving process of pattern surface, manufacturing tools, etc. The effect of improving sensitivity and reducing production costs
Active Publication Date: 2011-11-16
NAT UNIV OF DEFENSE TECH
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Problems solved by technology
Due to the fact that the manufacturing process used by the discrete device resistance and the accelerometer detection resistor is not exactly the same, the zero bias of the accelerometer and its temperature coefficient are large
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[0038] The present invention will be further described in detail below in conjunction with specific embodiments and accompanying drawings.
[0039] Such as figure 1 and figure 2As shown, the present invention has a piezoresistive biaxial micro-accelerometer with on-chip zero offset compensation, which includes a substrate 11 and an accelerometer assembly 12 connected together by bonding, and the accelerometer assembly 12 includes a frame 3 and a mutual The two accelerometer units are vertically arranged on the frame 3, the frame 3 mainly serves as a structural support, and the substrate 11 is a glass substrate. The two accelerometer units are an X-axis accelerometer 1 and a Y-axis accelerometer 2 for realizing acceleration detection along two orthogonal directions in a plane. Each accelerometer unit adopts a symmetrically arranged dual-mass tuning fork structure with four microbeams 6, that is, each accelerometer unit includes two symmetrically arranged mass blocks 5, and o...
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Abstract
The invention discloses a piezoresistive double-shaft micro-accelerometer with on-chip zero offset compensation and a manufacturing method thereof. The micro-accelerometer comprises a substrate and an accelerometer assembly, wherein, the substrate and the accelerometer assembly are connected by bonding, the accelerometer assembly comprises a frame and two accelerometer units which are arranged onthe frame in an orthogonal manner; each accelerometer unit comprises two mass blocks which are arranged in a symmetrical manner; one end of each mass block is connected on the frame through a girder and two micro beams; each micro beam is internally provided with a detection piezoresistance; four detection piezoresistances in four micro beams in each accelerometer unit form a Wheatstone full bridge structure. The invention further discloses the manufacturing method of the piezoresistive double-shaft micro-accelerometer with on-chip zero offset compensation, has simple and compact structure, convenient process, wide range of application and high measuring accuracy.
Description
technical field [0001] The invention mainly relates to the field of silicon micro-accelerometers, in particular to a piezoresistive biaxial micro-accelerometer and a manufacturing method. Background technique [0002] An accelerometer is a sensor that measures the acceleration of an object's motion. Sensitivity, bandwidth, resolution, zero bias and temperature coefficient are its main performance indicators. According to the material selected for the substrate, accelerometers can be mainly divided into two categories: silicon micromachined accelerometers and quartz accelerometers. According to the detection method, accelerometers can generally be divided into piezoresistive, piezoelectric, capacitive, tunnel current, resonant, thermal convection, etc., among which the former three are more widely used. In comparison, silicon micromachined piezoresistive accelerometers have the advantages of high detection sensitivity, large bandwidth, and simple interface processing circui...
Claims
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IPC IPC(8): G01P15/12B81B7/02B81C1/00B81C3/00
Inventor 吴学忠李圣怡董培涛侯占强肖定邦陈志华崔红娟牛正一
Owner NAT UNIV OF DEFENSE TECH