Free-etching oxidation manufacturing method of SOI submicron ridge optical waveguide back-taper coupler

Abstract

The invention relates to a free-etching oxidation manufacturing method of an SOI submicron ridge optical waveguide back-taper coupler, comprising the following steps: (1) oxidizing a silicon dioxide layer on SOI top-layer silicon; (2) forming a mask image on the silicon dioxide layer by a photoetching technology, wherein one end of the mask image is rectangular and the other end of the mask image is tapered by an etching technology; etching the silicon dioxide layer which is not protected by the mask image; and then forming a rectangular area and a tapered area of silicon dioxide protected by the mask image; (3) removing the mask image which is remained on the SOI top-layer silicon to form a sample; (4) oxidizing the sample, and oxidizing the etched SOI top-layer silicon under the etched silicon dioxide layer to a predetermined height so as to form a ridge waveguide flat area; (5) forming a ridge waveguide inner-ridge area on the SOI top-layer silicon protected by the tapered area of the silicon dioxide layer to form a slab waveguide back-taper structure which is connected with the inner-ridge area in a natural transition mode, and thus completing the natural integration of the ridge waveguide and the back-taper coupler.

Description

technical field [0001] The invention relates to the field of integrated optoelectronics, and provides an etching and oxidation-free manufacturing method for an SOI submicron ridge optical waveguide inverted cone coupler. Background technique [0002] In the field of optics, we often encounter the problem of optical coupling of optical waveguides with different cross-sectional sizes. When the light of the waveguide is coupled into a large-sized optical waveguide, a large optical loss will be caused. [0003] There is also the coupling problem between optical waveguides of different structures. The general shape of the ridge-type optical waveguide is like a "convex" shape, and the raised middle area is the main light-guiding area, which is called the inner ridge area or ridge-type area, and the two sides of the ridge-type area are open and extended, and the light transmitted between them Rarely, it is called a flat zone. The advantage of this structure is that it greatly re...

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Problems solved by technology

Therefore, the key to making the inverted cone coupler integrated with the ridge optical waveguide is to solve the unb

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