One-step method for making carboxylic acid functional monofilm on surface of micro cantilever beam
A micro-cantilever and functionalization technology, applied in the field of nano-functional film manufacturing, can solve the problems of unfavorable batch production, complicated steps, harsh manufacturing conditions, etc., and achieve the effect of easy operation, advanced method and low cost
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Embodiment 1
[0016] An aqueous solution of sodium trihydroxysilanetriol (Carboxyethylsilanetriol, sodium salt; 25%, hereinafter referred to as CES) was selected as the silylating agent, and a self-made micro-cantilever device was selected (for the manufacturing method of the micro-cantilever device, please refer to the Chinese invention patent, an integrated press Resisting silicon dioxide cantilever beam ultra-micro detection sensor, manufacturing method and application, patent application number 200610026523.9) is the device to be modified.
[0017] Take 3mL of CES aqueous solution, add it to 60mL of deionized water, mix well, adjust the pH value of the solution to between 4-5 with concentrated hydrochloric acid, and prepare an aqueous solution with a mass percent concentration of CES of 1.25%. Put the above solution in a special flat-bottomed flask, under the protection of nitrogen, slowly heat to 80°C for later use.
[0018] Soak the prepared micro-cantilever device in acetone, ethanol...
Embodiment 2
[0022] N-(trimethoxysilylpropyl)ethylenediamine triacetic acid sodium salt solution (N-(Trimethoxysilypropyl)ethylenediamine triacetic acid, trisodium salt; 45%, hereinafter referred to as EDATAS) was selected as the silylating reagent, and self-made micro-cantilever The device (for the manufacturing method of the micro-cantilever device, please refer to the Chinese invention patent, an integrated piezoresistive silicon dioxide cantilever beam ultra-micro detection sensor, manufacturing method and application, patent application number 200610026523.9) is the device to be modified.
[0023] Take 1 mL of EDATAS aqueous solution, add it to 60 mL of deionized water, mix well, adjust the pH value of the solution to between 2-3 with concentrated hydrochloric acid, and prepare an aqueous solution with 0.75% EDATAS concentration. Put the above solution in a special flat-bottomed flask, under the protection of nitrogen, slowly heat to 80°C for later use.
[0024] Soak the micro-cantile...
Embodiment 3
[0026] Embodiment 3: method is the same as embodiment 1 or embodiment 2, but the preparation method to CES aqueous solution is as follows.
[0027] Take 1 mL of CES aqueous solution, add it to 60 mL of deionized water, mix well, adjust the pH value of the solution to between 4-5 with concentrated hydrochloric acid, and prepare an aqueous solution with a mass percent concentration of CES of 0.8% or 2.8%. The above solution was placed in a special flat-bottomed flask, under the protection of nitrogen, slowly heated to 80°C for later use, and the rest were the same as in Example 1.
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