Method for producing polysilicon
A production method, polysilicon technology, applied in the direction of chemical instruments and methods, silicon, silicon compounds, etc., can solve the problems of high equipment and operation requirements, achieve the effect of reducing unit production cost, high polysilicon deposition rate, and promoting mass transfer
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[0101] Example 1:
[0102] In this embodiment, the reaction pressure in the reduction furnace is controlled at 0.3 MPa, and the reaction temperature is controlled at 1100°C.
[0103] At the beginning of the manufacturing method (at time 0), the hydrogen and trichlorosilane are respectively adjusted to 35.8Nm 3 / h and 5.5Nm 3 / h of air intake is continuously passed into the reduction furnace. At this time, the molar ratio Q value is 6.5.
[0104] First, it takes 45 hours to make the molar ratio Q expressed in the upper stage expression of the aforementioned first-order piecewise function (wherein the first-order piecewise function expression a value, b value, c value, and d value are passed in accordance with the aforementioned It is determined by calculation method, omitted here, the same below) is continuously reduced to 2.5. At the same time, within the aforementioned range, the inlet flow of hydrogen and trichlorosilane increase linearly and continuously to 96.8Nm with the increa...
Example Embodiment
[0119] Example 2:
[0120] In this embodiment, the reaction pressure in the reduction furnace is controlled at 0.3 MPa, and the reaction temperature is controlled at 1080°C.
[0121] At the beginning of the manufacturing method (at time 0), the hydrogen and trichlorosilane were used to 42.7Nm 3 / h and 6.1Nm 3 / h of air intake is continuously passed into the reduction furnace. At this time, the molar ratio Q value is 7.
[0122] First, it takes 45 hours to make the molar ratio Q expressed in the upper stage expression of the aforementioned first-order piecewise function (wherein the first-order piecewise function expression a value, b value, c value, and d value are passed in accordance with the aforementioned It is determined by calculation method, omitted here, the same below) is continuously reduced to 3.0. At the same time, within the aforementioned range, the inlet flow rate of hydrogen and trichlorosilane increases linearly and continuously to 118.5Nm with the increase of depos...
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