Micro electro mechanical system (MEMS) technology-based viscosity transducer chip and preparation method thereof

Abstract

The invention discloses an MEMS technology-based viscosity transducer chip and a preparation method thereof. The chip structure is a vibration principle-based triangular silicon micro-cantilever structure, which adopts the titanium-platinum-aurum beam type lead technology. The MEMS technology-based viscosity transducer chip has fast frequency response characteristic and extremely high sensitivity. The MEMS viscosity transducer has a measurement range from 1 to 100mPa.s, the precision superior to + / -5 percent FS, and can realize fast on-line less-sample accurate measurement under the conditions that the static pressure value is less than 100 MPa and the ambient temperature is between 20 DEG C below zero and 180 DEG C.

Description

Technical field: [0001] The invention relates to a microelectromechanical system (MEMS) technology viscosity sensor measuring chip, more precisely, a MEMS technology-based silicon micro-cantilever chip for viscosity sensors and a preparation method thereof. Background technique: [0002] There are many methods for measuring fluid viscosity. Typical traditional viscosity measurement methods include capillary method, rotation method, falling body method, vibration method, plate method, viscosity cup method, etc. There are also many types of viscometers based on these viscosity measurement methods, but some of these viscometers are difficult to manufacture, and some have relatively high test conditions. For example, the capillary method, although the manufacture and temperature control is simple, the experimental operation is convenient, the measurement accuracy is high, and the absolute measurement of the viscosity can be carried out, but it needs careful and frequent maintena...

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Problems solved by technology

[0005] The object of the present invention is to provide a silicon micro-cantilever beam chip based on micro-electromechanical system technology for viscosity sensors. By detecting the resonant frequency and quality factor of the chip cantilever beam, the on-line measurement of the viscosity of the measured fluid can be realized, which solves the problem of traditional viscosity measurement. In the method, the instrument is heavy and inconvenient to move, the test time is long, it is difficult to clean, and even it cannot be directly read and needs to be converted, and the required sample volume is large, and most of the analog signals that cannot be measured and output in real time; at the same time, improve Improve the sensitivity and quality factor of the sensor, improve its measurement accuracy (better than ±5% FS), and realize online measurement of fluid viscosity at high temperature (above 180°C) and high pressure (100MPa)

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