Plasma antenna and plasma process apparatus including the same
A processing device, plasma technology, applied in the direction of antenna support/installation device, plasma, antenna, etc., can solve the problems of complex shape, difficult mass production, low efficiency of plasma generation, etc.
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[0026] The details of the embodiments are included in the detailed description and the drawings.
[0027] The advantages, features and methods for realizing the present invention can be clearly understood by referring to the accompanying drawings and the embodiments described in detail below. However, the present invention is not limited to the embodiments disclosed below, and can be embodied in various forms different from each other. This embodiment is provided only to complete the disclosure of the present invention and to enable those with common sense in the technical field of the present invention to fully understand the invention, and the present invention can only be defined by the scope of the claims. And throughout the specification, the same reference numerals refer to the same constituent elements.
[0028] Hereinafter, the present invention will be described by way of embodiments of the present invention with reference to the drawings illustrating a plasma antenn...
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