Target with metal glass coating and composite material prepared from target

Abstract

The invention discloses a target with a metal glass coating. The ZraKbMcNd metal glass coating is formed on a substrate by sputtering, wherein K, M and N are selected from elements in VB group, VIB group, VIIIA group, IB group, IIIA group and IVA group; the atomic radius percentage of any two of K, M and N is not less than 15 percent; and a, b, c and d represent atomic composition percentage, wherein a is more than or equal to 30 percent and less than or equal to 77 percent, b is more than or equal to 11 percent and less than or equal to 50 percent, c is more than or equal to 4 percent and less than or equal to 15 percent, and d is more than or equal to 4 percent and less than or equal to 10 percent. The target is provided with a plurality of fan-shaped coating material units which are spliced into a disc or arranged continuously in a rectangular shape, wherein each coating material unit is provided with four element strips which consist of four metal elements, namely zirconium, K, M and N, and the number ratio of zirconium, K, M and N of all the element strips and the metal glass coating are in a sputtering generation proportional relationship.

Description

technical field [0001] The invention relates to a target material for coating and a composite material with a coating formed by the target, in particular to a target for forming a metallic glass coating and a composite material with a metallic glass coating formed from the target. Background technique [0002] "Metallic glass" is an alloy with an amorphous structure formed by mixing and melting various specific elements and then rapidly cooling and solidifying. It is also called "amorphous alloy" because of its high strength and excellent wear resistance. Mechanical properties, and superplastic forming characteristics at an appropriate temperature, and because of the lack of grain boundaries, it can be finely filled and molded under a lower deformation pressure, so it has been widely valued by all walks of life. [0003] At present, metallic glasses can be roughly divided into several categories such as Zirconium based metallic glass, Magnesium based metallic glass, and Tita...

AI Technical Summary

Problems solved by technology

[0005] For example, U.S. Patent No. 4965139 "CORROSION RESISTANT METALLIC GLASS COATINGS" proposes "using multi-target source (target) magnetron sputtering to deposit Based on the technical means of producing glass-metal coatings containing 8-30 atomic percent of boron, silicon, or a combination thereof; the difficulty of this technology lies in the use of multiple target sources to synthesize metallic glass coatings, and the multi-target originates from the coating In the process, not only is it difficult to control the uniformity of the coating thickness, but at the same time, it is also impossible to obtain a large-area metallic glass coating

[0006] In view of the use of a single target (with multiple elements) for coating, it is easier to control the coating process than using multiple targets for coating, and then obtain a coating with uniform thickness and a larger area. US Patent No. 7282123 "COMPOSITE SPUTTER TARGET AND PHOSPHOR The "DEPOSITION METHOD" case revealed the technical means of "a large single composite target for sputtering and a phosphorus deposition method". The metal disc is the matrix phase, and the surface is embedded in parallel checkerboard-shaped (about 2-3mm wide, 3mm-interval) or concentric ring-shaped (about 5-6mm wide, 2mm-interval) grooves. Inclusion phase, in which the base phase contains one or more metal elements, and at least one base phase contains phosphorus; the main problem of this technology is that the target is formed into parallel checkerboard or concentric circular grooves The design of embedding in the groove has practical difficulties in processing and production, and it is not easy for mass production and application

[0007] From the above description, it can be seen that although zirconium-based metallic glasses have excellent material properties, the actual production of large-area zirconium-based metallic glass coatings on substrates is currently not possible due to target design issues. Actual mass production for industrial application

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