Method for loading plasma enhanced chemical vapor deposition equipment and glass panel

Abstract

The invention discloses a method for loading plasma enhanced chemical vapor deposition equipment and a glass panel, comprising the following steps of: improving the sizes of the slot and the supporting plate wheel in the equipment, wherein the pitch between the inner wall of the slot and the polar plate is greater than the thickness of the glass panel, and the width of the supporting plate wheel is greater than the thickness of the glass panel; further fixedly connecting a clamp mechanism supporting plate outside the U-shaped aluminum grooves on both ends, wherein the clamp mechanism supporting plate is fixed with clamp mechanism brackets, and a clamp mechanism is connected between the clamp mechanism brackets corresponding on both ends; when loading, firstly, loading the lower locking strip clinging to both sides of the lower part of the polar plate, then, loading the glass panel and the upper locking strip on both sides of the polar plate; taking out all the upper and lower locking strips out after loading the glass panel, and finally rotating the clamp mechanisms from the lower part to the upper part with 90 degrees, so that the glass panel leans against both sides of the polar plate to be loaded. The invention can reduce the friction between the glass panel and the polar plate to a maximum extent and ensure the quality of the coating film, thereby reducing the defective index and improving the economic benefit.

Description

technical field [0001] The present invention relates to solar cell production technology, in particular, relates to plasma enhanced chemical vapor deposition equipment, that is, flat panel PEVCD equipment, and a corresponding glass plate loading method. Background technique [0002] With the continuous improvement of human productivity and living standards, people's demand for traditional energy such as oil and coal is increasing day by day. Currently the most widely used petrochemical energy is not only limited in quantity and facing depletion, but also more and more harmful to the environment. With the increasingly serious problems of resource depletion, environmental pollution and ecological damage, countries around the world have been competing to implement sustainable energy policies in recent years, hoping that inexhaustible, clean and environmentally friendly renewable energy can change the energy structure of mankind. Among them, solar energy has become the consensu...

AI Technical Summary

Problems solved by technology

In production, since the glass plate to be coated is inserted and taken out close to the pole plate, the glass plate and the pole plate will scratch each other due to friction, which will affect the quality of the coating. Therefore, during the production process of the solar cell plate High scrap rate, resulting in poor economic benefits

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