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Grainofice-type concretion abrasive polishing pad as well as rapid preparation method and device

A technology of consolidating abrasives and polishing pads, which is applied in the direction of grinding/polishing equipment, grinding devices, abrasives, etc., can solve the problems of poor uniformity and reliability, easy settlement of abrasives, and low efficiency, and achieve easy forming and simple manufacturing , Ease of use

Inactive Publication Date: 2011-05-11
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a kind of ice particle type fixed abrasive polishing pad and rapid preparation method for the shortcomings of the existing frozen fixed abrasive polishing pad, such as low efficiency, easy sedimentation at low temperature, poor uniformity and reliability, etc. Method and device, in order to meet the current requirements of not only ensuring the polishing quality of workpieces but also improving economic benefits

Method used

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  • Grainofice-type concretion abrasive polishing pad as well as rapid preparation method and device
  • Grainofice-type concretion abrasive polishing pad as well as rapid preparation method and device
  • Grainofice-type concretion abrasive polishing pad as well as rapid preparation method and device

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Embodiment 1

[0042] Such as figure 1 , 2 , 3 shown.

[0043] A rapid preparation device for an ice particle-type consolidated abrasive polishing pad, mainly composed of a self-pressurized liquid nitrogen tank 1, a liquid nitrogen atomizing nozzle 4, a heat exchanger 13, a polishing liquid atomizing nozzle 5, a first high-pressure pump 6, Polishing fluid storage tank 7, forming mold 12, water storage tank 8, second high-pressure pump 9 and normal temperature water or normal temperature deionized water atomization nozzle 10, such as figure 1 As shown, the inner wall material of the heat exchanger 13 is polytetrafluoroethylene, which can prevent the ice particles formed after freezing from adhering to the inner wall, and the outer wall material is made of stainless steel; the atomized polishing solution and the atomized After the liquid nitrogen is exchanged by convection in the heat exchanger, ice particles containing abrasives are finally formed. The output end of the self-pressurized li...

Embodiment 2

[0045] A kind of ice particle type fixed abrasive polishing pad for ultra-thin material polishing, consists of 400 grams of nanometer Al 2 o 3 (or nano-SiO 2 ) abrasive, 50 grams of additives (which are composed of 5 grams of polyhydroxydiamine, 20 grams of polyvinylpyrrolidone, 5 grams of disodium edetate, and 20 grams of polyanionic cellulose) and 500 grams of water ( Or concentration of 45% aqueous ethanol) composition. Before use, the three are mixed to form a uniformly dispersed and well-suspended polishing liquid, and then, the prepared polishing liquid is pumped into the heat exchanger 13 by the high-pressure pump 6 and atomized through the atomizing nozzle 5; at the same time , the liquid nitrogen is transported from the self-pressurized liquid nitrogen tank 1 to the heat exchanger 13, atomized through the atomizing nozzle 4, and then, the atomized polishing liquid is rapidly cooled in the heat exchanger 13 to form tiny particles containing abrasives. ice pellets. ...

Embodiment 3

[0047] A kind of ice particle type fixed abrasive polishing pad for supersoft material polishing, consists of 200 grams of nanometer CeO 2 (or nano-SiO 2 ) abrasive, 60 grams of additives (which are composed of 10 grams of polyhydroxydiamine, 20 grams of polyvinylpyrrolidone, 5 grams of disodium edetate, and 25 grams of polyanionic cellulose) and 700 grams of water ( or aqueous ethanol with a concentration of 35). Before use, the three are mixed to form a uniformly dispersed and well-suspended polishing liquid, and then, the prepared polishing liquid is pumped into the heat exchanger 13 by the high-pressure pump 6 and atomized through the atomizing nozzle 5; at the same time , the liquid nitrogen is transported from the self-pressurized liquid nitrogen tank 1 to the heat exchanger 13, atomized through the atomizing nozzle 4, and then, the atomized polishing liquid is rapidly cooled in the heat exchanger 13 to form tiny particles containing abrasives. ice pellets. Then, the ...

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Abstract

The invention provides a grainofice-type concretion abrasive polishing pad as well as rapid preparation method and device aiming at overcoming the defects of low efficiency as well as poor evenness and reliability in the preparation process of the freezing concretion abrasive polishing pad so as to meet the requirement of ensuring the polishing quality of the workpiece and improving the economic benefit. The method comprises the following steps of: firstly, evenly dispersing abrasive in deionized water to prepare polishing solution, then atomizing the polishing solution into even liquid drops by using an atomizer, rapidly cooling the liquid drops into fine grainofice at a low temperature, spraying the atomized constant-temperature deionized water on the surface of the grainofice and placing in a mould, and then performing vibration platform jolt ramming to prepare the rainofice-type concretion abrasive polishing pad. The polishing pad can be used for polishing and processing various thin workpieces, is particularly suitable for thermal sensitivity materials, soft material, crystal materials, and the like. The invention has the advantages of simple process, low processing cost, high processing efficiency, strong technical control ability, environmental protection, and the like.

Description

technical field [0001] The invention relates to a frozen polishing pad and its preparation method and device, in particular to a method of convective heat exchange using atomized liquid nitrogen and atomized polishing liquid to quickly freeze into ice particles containing abrasives, and then use the The atomized normal temperature water or deionized water is used as a binder, and the ice particles are vibrated by a vibrating platform to prepare the obtained polishing pad and its preparation method and device. Specifically, it is an ice particle type solidified abrasive polishing pad, a rapid preparation method and a manufacturing device. Background technique [0002] As we all know, the traditional CMP (Chemical Mechanical Polishing) system is composed of three parts: a rotating workpiece holding device, a workbench carrying a polishing pad, and a polishing liquid (slurry) supply system. During polishing, the rotating workpiece is pressed against the polishing pad that rota...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24D11/00B24D18/00
Inventor 孙玉利左敦稳于守鑫祝晓亮朱永伟卢文壮李军
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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