Large high-vacuum air pumping set

Abstract

The invention relates to a novel air pumping set which is applicable to the evacuating field. The novel air pumping set comprises a traction molecular pump, an arc titanium pump, a roughing pump and a fore pump, complements each other's advantages, and achieves the purpose of replacing the traditional air pumping set comprising a diffusion pump, a Roots pump and a roughing pump. Compared with the traditional air pumping set, the invention can save the air-pumping energy by 60-90%, eliminate the oil steam pollution in a vacuum chamber, and obviously improve the quality of vacuum products. The cost performance of the air pumping set is approximately 2-3 times better than that of the traditional high-vacuum air pumping set. Besides, the transpiration rate of the titanium materials of the air pumping set can be accurately controlled, and the titanium materials have a high use ratio and can be recycled. The roughing pump of the invention works in a very short time, and one roughing pump can be shared by multiple high-vacuum air pumping sets, thereby saving the device cost and the occupied space.

Description

technical field [0001] The invention belongs to the field of vacuum pumping, in particular to a clean and energy-saving large-scale high-vacuum pumping unit. Background technique [0002] The pumping speed of large-scale high-vacuum pumping units usually reaches tens of thousands of L / s. At present, the unit composed of diffusion pump + Roots pump + rough pump is generally used to pump air. The rough pump consists of a slide valve pump and a rotary vane pump. and other components, the pumping process of the unit is: 10 3 Pa≤vacuum chamber air pressure≤atmospheric pressure, pumped by rough pump; 1≤vacuum chamber air pressure<10 3 Pa, pumped by the Roots pump; the pressure of the vacuum chamber is <1Pa, pumped by the diffusion pump (but in the range of 0.1-1Pa, the pumping speed is low, only a few thousand L / s). The energy consumption of the air extraction unit is high, and they all have oil pumps, so the oil vapor pollution is serious, which affects the quality of vac...

AI Technical Summary

Problems solved by technology

The energy consumption of the air pumping unit is high, and they all have oil pumps, and the oil vapor pollution is serious, which affects the quality of vacuum products. It is a problem that needs to be solved urgently in the vacuum industry, but has not been overcome.

[0003] Recently, part of the air extraction unit uses a deep-cooled water vapor pump (POLYCOLD, the temperature of the condensing plate is about -120°C) in parallel with a diffusion pump to form a composite air extraction unit, which reduces energy consumption and oil vapor pollution to a certain extent. However, the volume of the water vapor pump Huge, expensive, high energy consumption, coupled with long start-up time, easily affected by heat radiation, pumping capacity and inconvenient maintenance, etc., have not been widely used

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