Large high-vacuum air pumping set

An air pumping unit and high vacuum technology, applied in the field of vacuum pumping, can solve the problems of long start-up time, bulky water vapor pump, and high price, so as to save equipment cost and floor space, eliminate oil vapor pollution, and save air pumping The effect of energy consumption

Inactive Publication Date: 2010-07-14
SHENZHEN MOL VACUUM TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The energy consumption of the air pumping unit is high, and they all have oil pumps, and the oil vapor pollution is serious, which affects the quality of vacuum products. It is a problem that needs to be solved urgently in the vacuum industry, but has not been overcome.
[0003] Recently, part of the air extraction unit uses a deep-cooled water vapor pump (POLYCOLD, the temperature of the condensing plat

Method used

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  • Large high-vacuum air pumping set

Examples

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Effect test

Embodiment 1

[0021] Embodiment 1. Large-scale high vacuum pumping unit

[0022] refer to figure 1 As shown, the large-scale high-vacuum pumping unit provided by the embodiment of the present invention includes a vacuum chamber 11, and the vacuum chamber 11 is respectively connected with a roughing pump 13, a traction molecular pump 15 and an arc titanium pump 16.

[0023] Specifically, the vacuum chamber 11 is connected to the rough pump 13 through a low vacuum valve 12, and the vacuum chamber 11 is connected to the arc titanium pump 16 through a half-fixed louvered gas collection plate 161, and the vacuum chamber 11 is connected to the arc titanium pump 16 through A high vacuum valve 14 is connected with a dragging molecular pump 15 , and the dragging molecular pump 15 is connected with a low pumping speed backing pump 18 through a low vacuum valve 17 .

[0024] Further, a vacuum gauge 19 is provided between the vacuum chamber 11 and the roughing pump 13, a vacuum gauge 110 is provided b...

Embodiment 2

[0028] Embodiment 2: Large-scale high-vacuum pumping unit with sublimation titanium pump

[0029] like image 3 As shown, the structure of the second embodiment is substantially the same as that of the first embodiment, the difference being that several sublimation titanium pumps 21 ( image 3 2 are shown in ), once the arc evaporation source 162 stops discharging, the sublimation titanium pump 21 will take over. This measure can improve the vacuum degree of this embodiment by 2 to 4 orders of magnitude.

[0030] The pumping process of the large-scale high vacuum pumping unit provided by Embodiments 1 and 2 of the present invention is as follows:

[0031] When 100Pa≤the air pressure of the vacuum chamber≤atmospheric pressure, the rough pump 13 is used to draw air. Very short, one roughing pump 13 can be shared by multiple high-vacuum pumping units, saving equipment costs and floor space;

[0032] When 0.1Pa≤the air pressure of the vacuum chamber 11<100Pa, the traction molec...

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Abstract

The invention relates to a novel air pumping set which is applicable to the evacuating field. The novel air pumping set comprises a traction molecular pump, an arc titanium pump, a roughing pump and a fore pump, complements each other's advantages, and achieves the purpose of replacing the traditional air pumping set comprising a diffusion pump, a Roots pump and a roughing pump. Compared with the traditional air pumping set, the invention can save the air-pumping energy by 60-90%, eliminate the oil steam pollution in a vacuum chamber, and obviously improve the quality of vacuum products. The cost performance of the air pumping set is approximately 2-3 times better than that of the traditional high-vacuum air pumping set. Besides, the transpiration rate of the titanium materials of the air pumping set can be accurately controlled, and the titanium materials have a high use ratio and can be recycled. The roughing pump of the invention works in a very short time, and one roughing pump can be shared by multiple high-vacuum air pumping sets, thereby saving the device cost and the occupied space.

Description

technical field [0001] The invention belongs to the field of vacuum pumping, in particular to a clean and energy-saving large-scale high-vacuum pumping unit. Background technique [0002] The pumping speed of large-scale high-vacuum pumping units usually reaches tens of thousands of L / s. At present, the unit composed of diffusion pump + Roots pump + rough pump is generally used to pump air. The rough pump consists of a slide valve pump and a rotary vane pump. and other components, the pumping process of the unit is: 10 3 Pa≤vacuum chamber air pressure≤atmospheric pressure, pumped by rough pump; 1≤vacuum chamber air pressure<10 3 Pa, pumped by the Roots pump; the pressure of the vacuum chamber is <1Pa, pumped by the diffusion pump (but in the range of 0.1-1Pa, the pumping speed is low, only a few thousand L / s). The energy consumption of the air extraction unit is high, and they all have oil pumps, so the oil vapor pollution is serious, which affects the quality of vac...

Claims

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Application Information

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IPC IPC(8): F04B41/06F04B37/14
Inventor 储继国
Owner SHENZHEN MOL VACUUM TECH CO LTD
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