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Quartz tuning fork-based nano measuring head and sample surface micro-topography measuring method

A quartz tuning fork, micro-topography technology, used in electromagnetic measuring devices, electrical/magnetic roughness/irregularity measurement, etc., can solve the problem of long contact time between probe and sample, large sample damage, and unsuitable for soft material detection and other problems, to achieve the effect of ensuring spatial resolution, short contact time, and large effective length

Inactive Publication Date: 2010-07-14
HEFEI UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the shear force mode, the contact time between the probe and the sample is longer, and the damage to the sample is greater, which is not suitable for the detection of soft materials.

Method used

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  • Quartz tuning fork-based nano measuring head and sample surface micro-topography measuring method
  • Quartz tuning fork-based nano measuring head and sample surface micro-topography measuring method
  • Quartz tuning fork-based nano measuring head and sample surface micro-topography measuring method

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Experimental program
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Effect test

Embodiment Construction

[0022] see figure 1 , the present embodiment adopts quartz tuning fork 1 as the micro force sensor of detection sample microscopic topography, and piezoelectric driver 2 is fixedly installed on a tuning fork arm of quartz tuning fork 1, and piezoelectric sensor 3 is fixedly installed on another tuning fork arm; The vibration direction of the tuning fork 1 is perpendicular to the surface of the sample. On the tuning fork arm near the side where the sample 6 is located, a tungsten probe 7 vertically pointing to the sample surface is fixedly installed, and the tungsten probe 7 forms a light weight on the surface of the sample 6. Knock mode, realize the excitation and frequency tracking of the quartz tuning fork with a phase-locked loop.

[0023] In the specific implementation, the quartz tuning fork 1 is obtained by removing the shell of the CFS308 quartz crystal oscillator, which replaces the silicon material cantilever in the AFM, and works in the tapping mode, which is differe...

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Abstract

The invention discloses a quartz tuning fork-based nano measuring head, which is characterized in that a quartz tuning fork is adopted as a micro-force sensor for sensing sample micro-topography, a piezoelectric driver is fixed on one tuning fork arm of the quartz tuning fork, and a piezoelectric sensor is fixed on the other tuning fork arm; and the vibration direction of the quartz tuning fork is set to be vertical to the surface of a sample, the tuning fork arm on one side close to the sample is fixedly provided with a tungsten probe vertically pointing to the surface of the sample, a sine alternating-current signal serving as a vibration exciting signal is applied to the piezoelectric driver, and the piezoelectric sensor detects a tuning fork resonance signal. The vibration direction of the tuning fork is vertical to the surface of the sample, so the contact time of the probe and the sample is short, the damage to the sample is little, and the quartz tuning fork-based nano measuring head is particularly suitable for detecting the surface of soft materials with high precision and micro measuring force.

Description

technical field [0001] The invention relates to a nano measuring head based on a quartz tuning fork that can be applied to the surface of a soft material for high-precision, micro-measurement force measurement and a measurement method for measuring the microscopic topography of a sample surface with the nano measuring head. Background technique [0002] According to the high-precision requirements for surface measurement of micro-semiconductor devices, MEMS, and nano-devices, as well as the non-destructive requirements for surface measurement of biological materials such as DNA and protein molecules, measuring instruments must not only have nanoscale resolution, but also have as much as possible Small measuring force. [0003] So far, high-precision measuring instruments that can be used for precise measurement of surface topography mainly include stylus surface profilers, optical surface profilers, and scanning probe microscopes (SPM) represented by atomic force microscopes...

Claims

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Application Information

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IPC IPC(8): G01B7/34
Inventor 黄强先王广红万耿华刘小为倪康
Owner HEFEI UNIV OF TECH
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