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Micro plane-type gas spark gap switch

A gas spark gap, planar technology, applied in the direction of spark gaps, spark gap parts, electrical components, etc., can solve the problems of inconvenient integration and integration, inconvenient practical application, long trigger time of switches, etc., to improve reliability and safety Resilience, increased strength and effect, shortened trigger time effects

Inactive Publication Date: 2010-08-25
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the distance between the electrodes of this technology is large, resulting in a long switch trigger time; and the device is large in size, which is not convenient for integration and integration with other devices; the trigger electrode is located between the positive and negative electrodes, which makes the generated pulse current small, which is not convenient for practical use. application

Method used

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  • Micro plane-type gas spark gap switch
  • Micro plane-type gas spark gap switch
  • Micro plane-type gas spark gap switch

Examples

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Embodiment 1

[0028] As shown in Figure 1, this embodiment includes: an insulating substrate 1, a first negative electrode 2, a second negative electrode 8, a positive electrode 3, a trigger electrode 4, a negative electrode connection unit 5, a positive electrode connection unit 6 and a trigger electrode The connection unit 7, wherein: the first negative electrode 2 and the second negative electrode 8, the positive electrode 3, the trigger electrode 4, the negative electrode connection unit 5, the positive electrode connection unit 6 and the trigger electrode connection unit 7 are all fixed on the insulating substrate 1 Above, the trigger electrode 4 is located between the first negative electrode 2 and the second negative electrode 8, the positive electrode connection unit 6 is connected to the positive electrode 3, and the negative electrode connection unit 5 is connected to the first negative electrode 2 and the second negative electrode 8 respectively, The trigger electrode connection u...

Embodiment 2

[0041] As shown in FIG. 4 , the difference between this embodiment and Embodiment 1 is that the insulating substrate 1 is a quartz substrate, and the shapes of the first negative electrode 2 , the second negative electrode 8 and the positive electrode 3 are all rectangular parallelepiped. Quartz substrate can improve the insulating effect of the substrate. The distance between the first negative electrode 2 and the second negative electrode 8 is 200 microns, and the dimensions of the two negative electrodes are: 1000 microns in length, 800 microns in width, and 200 microns in height, and are made of multiple stacked electroplating nickel or copper metals . The distance between the positive electrode 3 and the first negative electrode 2 and the second negative electrode 8 is 1500 microns, the size of the positive electrode 3 is: 2000 microns in length, 800 microns in width, and 200 microns in height. make.

[0042] This embodiment can reduce the damage and ablation of the fir...

Embodiment 3

[0044] As shown in Figure 5, the difference between this embodiment and Embodiment 1 is that the trigger electrode 4 is located between the negative electrode 2 and the positive electrode 3, the distance between the first negative electrode 2 and the second negative electrode 8 is 100 microns, and the positive electrode 4 is located between the negative electrode 2 and the positive electrode 3. 3 is a semi-circular cylinder with a radius of 800 microns and a height of 100 microns, the distance between the first negative electrode 2 and the second negative electrode 8 is 800 microns, and it is made of multiple layers of electroplated nickel or copper metal. The distance between the trigger electrode 4 and the first negative electrode 2 and the second negative electrode 8 is 50 microns.

[0045] This embodiment can improve the spark discharge effect between the first negative electrode 2 , the second negative electrode 8 and the trigger electrode 4 , increase the number of electr...

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Abstract

The invention relates to a micro plane-type gas spark gap switch, belonging to the technical field of micro electromechanical engineering. The micro plane-type gas spark gap switch comprises an insulated substrate, a positive electrode, a first negative electrode, a second negative electrode, a trigger electrode, a positive electrode connection unit, a negative electrode connection unit and a trigger electrode connection unit, wherein the trigger electrode is arranged in the middle of the first negative electrode and the second negative electrode or is arranged in the middle of the positive electrode and the negative electrode, the first negative electrode and the second negative electrode are placed in a form of mirror images, the positive electrode connection unit is connected with the positive electrode, the negative electrode connection unit is respectively connected with the first negative electrode and the second negative electrode, the trigger electrode connection unit is connected with the trigger electrode, and the positive electrode is placed in a way of respectively facing to the first negative electrode and the second negative electrode. The invention has the advantages that the micro plane-type gas spark gap switch can be widely used in all kinds of pulse current places, the micron-scale electrode spacing is realized, the trigger time is shorted, the nanosecond-scale rapid trigger is realized and the current value of the output pulse current is enhanced; and the mass production is realized and the production cost is greatly reduced.

Description

technical field [0001] The invention relates to a micro switch in the technical field of micro-electromechanical engineering, in particular to a miniature planar gas spark gap switch. Background technique [0002] The gas spark gap switch based on traditional machining has attracted much attention due to its advantages of reliable operation, strong impact resistance, large pulse current generation, short trigger time and reusability. The traditional gas spark gap switch, whether it is a two-electrode switch or a three-electrode switch, its processing method is developed on the basis of traditional machining technology. In many cases, refractory metal electrodes are welded in a closed cavity. Due to the limitation of processing technology, the volume of the device is often large. At the same time, the welding, fixing and spacing modulation of refractory metal electrodes increase the difficulty of processing and greatly increase the manufacturing cost. [0003] The current ga...

Claims

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Application Information

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IPC IPC(8): H01T1/00H01T1/20
Inventor 丁桂甫周镇威杨卓青陆闻静隋灵禾
Owner SHANGHAI JIAO TONG UNIV
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