Grindstone for conditioning of surface plate

Abstract

The invention provides a grindstone for conditioning of a surface plate. In a lapping machine comprising a lapping plate and a conditioning carrier disposed thereon, the carrier being provided with bores for receiving conditioning grindstone segments, the lapping plate is polished and conditioned by cooperatively rotating the lapping plate and the carrier and feeding loose abrasive grains to the lapping plate. The conditioning grindstone segment of a shape of arcuated trapezoid having an included angle of 180 DEG - 90 DEG is fitted in the carrier bore. When a workpiece is actually lapped using loose abrasive grains, adequate abrasive grains are caught within opened spheroidal graphite holes on the lapping plate surface, the retaining force of grains within holes is increased to produce a stable lapping force, and the fine texture surface of the lapping plate is transferred to the workpiece. Thus the workpiece is finished to a minimal surface roughness.

Description

technical field [0001] The invention relates to a grinding stone for platform correction, a polishing device for platform correction and a correction method for the polishing platform. The grinding stone for platform correction is used to correct the polishing platform in the polishing device, and the polishing device is on the polishing platform. A platform correction carrier having a hole for holding a grinding stone for correction is provided, and a grinding stone for correction is held in the hole of the carrier so that the polishing platform and the carrier are rotated separately, and free abrasive grains are supplied to the polishing platform so that the Polishing platform polishing. Background technique [0002] In the past, in terms of polishing devices for polishing polishing workpieces such as silicon wafers, synthetic quartz glass, crystals, liquid crystal glasses, and ceramics, some people have used figure 1 device shown. here, figure 1 One of them is a polish...

AI Technical Summary

Problems solved by technology

[0004] However, these platform correction jigs must be corrected and polished for a long time in order to correct and flatten the platform. After polishing, burrs are generated on the holes produced by the combustion of granular graphite on the surface of the cast iron platform, and the surface of the cast iron platform becomes rough state

In addition, in recent years, the size of the polishing machine has been significantly increased, and the platform correction jig must also be enlarged in proportion, and the weight of the jig also increases, which hinders the handling.

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