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Roll angle measurement method based on common path parallel beams

A technology of roll angle measurement and roll angle, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of increasing the volume of the measuring system, increasing the influence of air, increasing the distance, etc., to improve stability and reliability , the effect of improving the sensitivity and improving the compactness

Inactive Publication Date: 2012-01-11
ZHEJIANG UNIV
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Problems solved by technology

However, in this way, the optical distance of the two measurement lights in the air is also doubled, and the influence of the air on the measurement is also increased.
In addition, the method of measuring the roll angle based on parallel rays can only increase the distance between parallel rays to increase the measurement resolution, thereby increasing the volume of the measurement system

Method used

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  • Roll angle measurement method based on common path parallel beams
  • Roll angle measurement method based on common path parallel beams
  • Roll angle measurement method based on common path parallel beams

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Embodiment Construction

[0040] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments, but the present invention is not limited thereto.

[0041] figure 1 It is the first embodiment of the device for realizing the method for measuring the roll angle of the present invention, and the method for measuring the roll angle by common path parallel lines is as follows:

[0042] (1) In the fixed unit 100, the collimated laser light emitted by the laser 1 passes through the first polarization beam splitter 3 to generate two linearly polarized lights, and the polarization directions are respectively perpendicular to each other. direction and direction, where The linearly polarized light passes through the first polarizing beam splitter 3 to be the measuring light I;

[0043] And the linearly polarized light enters the second polarized beam splitter 4 arranged along the light direction of the linearly polarized light, and the second polarized be...

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Abstract

The invention discloses a roll angle measurement method based on common path parallel beams, comprising the steps of: polarizing and splitting beams twice to obtain two parallel beams; and simultaneously utilizing a reflection device of which a pair of reflection plane surfaces form a 90-degree angle and a pair of reverse reflectors to realize the common path and the error amplification of the two parallel beams. Therefore, the compactness of the structure, the stability of the system as well as the reliability and the flexibility of the measurement are improved.

Description

technical field [0001] The invention belongs to the technical field of angle optical measurement, in particular to a roll angle measurement method. Background technique [0002] Among the three angular motion errors of the machine tool guide rail, the roll angle error is the most difficult parameter to measure among the six errors. Systems such as machine tools and three-coordinate measuring machines need to measure roll angles, pitch angles, and yaw angles in order to correct Abbe errors in real time. In addition, in the installation and calibration of some workpieces, it is also necessary to measure or position the roll angle. [0003] At present, there are mainly four methods of optically measuring the roll angle as follows: [0004] Based on the interferometry method. Although some interferometric systems can obtain very high measurement resolution, the measurement systems are too complex and expensive (such as the roll angle measurement method disclosed in Chinese pa...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/26
Inventor 匡翠方郝翔王婷婷刘旭
Owner ZHEJIANG UNIV