Base island exposed type and embedded type base island lead frame structure and first-engraving last-plating method thereof
A technology of lead frame and base island, which is applied in the field of semiconductor packaging, and can solve the problems of missing feet, plastic package body and metal feet, etc.
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[0042] The exposed and embedded base island lead frame of the present invention is engraved first and then plated as follows:
[0043] Step 1. Take the metal substrate
[0044] see figure 1 , take a metal substrate 6 with a suitable thickness. The material of the metal substrate 6 can be changed according to the functions and characteristics of the chip, such as copper, aluminum, iron, copper alloy or nickel-iron alloy.
[0045] Step 2, film pasting operation
[0046] see figure 2 , using a film sticking device to respectively stick photoresist films 7 and 8 that can be exposed and developed on the front and back of the metal substrate to protect the subsequent etching process.
[0047] Step 3. Remove part of the photoresist film from the front of the metal substrate
[0048] see image 3 , using exposure and development equipment to expose and develop the front side of the metal substrate that has completed the film attachment operation in step 2 to remove part of the...
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