Femtosecond laser processing device
A femtosecond laser processing and femtosecond laser technology, which is applied in laser welding equipment, metal processing equipment, optics, etc., can solve the problems of uneven horizontal and vertical processing resolution, and improve the vertical processing resolution and Rayleigh length. The effect of shortening
Inactive Publication Date: 2010-10-20
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology
[0004] The technical problem to be solved by the present invention is to overcome the shortcomings of the above-mentioned existing femtosecond laser direct writing technology of uneven horizontal and vertical processing resolution, and to provide a femtosecond laser processing device, which should be able to achieve isotropic processing accuracy , can be applied to the fabrication of optical waveguides and microfluidic channels
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[0017] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.
[0018] see first figure 1 , figure 1 It is a schematic diagram of the optical path of the femtosecond laser processing device of the present invention. As can be seen from the figure, the femtosecond laser processing device of the present invention includes a femtosecond laser 1, and the femtosecond laser optical path output along the femtosecond laser 1 is successively an aperture diaphragm 2, a parallel grating pair 3, a dichroic mirror 5, a display Micro-objective lens 6, processing object 7, this processing object 7 is fixed on the three-dimensional precise electric control displacement platform 8 and makes the focal point of described microscopic objective lens 6 be positioned at the inside of this processing object 7, described parallel grating pair 3 two Two gratin...
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The invention relates to a femtosecond laser processing device which comprises a femtosecond laser device and other components along a femtosecond laser path output by the femtosecond laser device, i.e. a pinhole aperture, a parallel grating pair, a dichroic mirror, a microscope objective and a processing object. The processing object is fixed on a three-dimensional precise electric-control displacement platform to locate a focus of the microscope objective in the processing object, an included angle of 45 degrees is formed between the dichroic mirror and the femtosecond laser path, a lighting source is arranged in the vertical direction of the dichroic mirror, white light emitted by the lighting source is reflected by the dichroic mirror, passes through the microscope objective and is focused in a processing region of the processing object for lighting the whole processing process, a lens and a CCD (Charge-Coupled Device) are sequentially arranged in the other reflection direction of the dichroic mirror, and the three-dimensional precise electric-control displacement platform and the CDD are connected with a computer. The device of the invention can realize the isotropic high-precision processing and can be applied to the preparation of optical waveguide and microfluidic channels.
Description
technical field [0001] The invention relates to femtosecond laser processing, in particular to a femtosecond laser processing device, which uses femtosecond laser time focusing to make the three-dimensional light intensity distribution at the laser focus close to a spherical shape. The invention does not need to consider the direct writing direction of the femtosecond laser, and can process a three-dimensional microfluidic channel and an optical waveguide arranged in any direction and having a circular cross section inside the transparent material. Background technique [0002] The femtosecond laser is unique in the field of contemporary micro-manufacturing due to its advantages of high processing precision, small thermal effect, low damage threshold and the ability to realize three-dimensional micro-machining of transparent materials. It provides us with a new way to prepare large-scale, complex three-dimensional micro method of structure. At present, it has shown importan...
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Login to View More IPC IPC(8): B23K26/00B23K26/06G02B27/09B23K26/064B23K26/50
Inventor 程亚何飞徐晗熊辉倪洁蕾冯雯徐至展
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI