Electromagnetic sensor-based metal film thickness measuring device and method
A technology of electromagnetic sensor and metal film, which is applied in the direction of electromagnetic measuring device, electric/magnetic thickness measurement, etc., to achieve the effect of simple structure, sensitive detection and low cost
Inactive Publication Date: 2012-06-27
TIANJIN UNIV
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[0016] figure 1 It is a structural block diagram of a measuring device drawn according to an embodiment of the present invention. It consists of seven parts: exciting coil, receiving coil, signal generating unit, signal collecting unit, power amplifier and host computer. see figure 2 , the electromagnetic sensor 1 is a coil array, including an excitation coil 3, two receiving coils 4 and 5; the excitation and receiving coils are air-core, coaxial and parallel to each other, and the receiving coil is composed of two coils of a differential structure, The production method is to calibrate two winding circles on a cylindrical frame, the distance depends on the sensor requirements, select two calibration points located on different cross-sections on a cylindrical frame, and connect a wire from one to the other. The calibration point starts to wind a circle on the cross section where it is located, and then starts to wind a circle from another calibration point according to the ...
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The invention belongs to the technical field of electromagnetic sensors and relates to an electromagnetic sensor-based metal film thickness measuring device. The device comprises an electromagnetic sensor, a signal generating unit, a power amplifier, a signal acquisition unit and a host computer, wherein the electromagnetic sensor comprises three parallel and coaxial coils; two coils on an outer side serve as receiving coils and are formed by winding the same winding according to the same winding density, number of turn, coil diameter and opposite winding directions; one ends of the two coilsare mutually connected, and the other ends of the two coils are taken as receiving ends, so that a differential structure is formed; the middle coil serves as an exciting coil; the host computer controls the signal generating unit to generate actuating signals of which the frequencies are different and which are connected to an exciting input end after passing through the power amplifier; and thesignal acquisition unit acquires sending signals of the coils from the two receiving ends. The invention also provides an electromagnetic sensor-based metal film thickness measuring method. The device has the advantages of simple structure, low cost, sensitive detection, accuracy, rapidness and effectiveness.
Description
technical field [0001] The invention belongs to the technical field of material testing, and relates to a measuring device and a measuring method for metal film thickness. Background technique [0002] In many occasions in industrial applications, it is necessary to measure the thickness of the metal film. Strict control of the thickness of the metal film is meaningful in the automotive industry, precision machining, and even integrated circuit production. For example, the measurement of nanoscale metal film thickness in silicon substrate CMOS radio frequency integrated circuits is of great significance, because the Q value of the planar spiral inductor in silicon substrate CMOS radio frequency integrated circuits is affected by the thickness of the metal film layer; in other material processing fields , the thickness measurement of metal coatings is also a widespread problem. [0003] So far, using the electromagnetic method to measure the thickness of the metal film is a ...
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IPC IPC(8): G01B7/06
Inventor 尹武良王奔
Owner TIANJIN UNIV