Micro-electrode array based on electrostatic induction load dispatching and online horizontal electrospark machining method of array hole

Abstract

The invention relates to a micro-electrode array and an online horizontal electrospark machining method of an array hole. The online horizontal electrospark machining method is a new method which is used for machining a micro-electrode array on a micro electrospark wire cutting machine tool and then directly and horizontally machining the array hole on line. The method comprises the following steps of: electrospark wire cutting of the micro-electrode array and online horizontal electrosparking of the micro array hole. When the electrode array is machined, an electrode wire (2) is connected with an output terminal (A) of a static induction unipolar pulse power supply (8), and a square bar stock (5) for machining the electrode array is connected with an output terminal (B); after the first step of groove array machining of the electrostatic induction wire cutting is finished on the square bar stock, the square bar stock is overturned to 90 degrees on a special electrode array clamp (6) to carry the second step of electrode array machining; after the electrode array machining is finished, the electrode is kept to be online (the electrode is continuously clamped on the clamp); and when the array hole is machined, the array electrode is connected with a power supply output terminal (A), an array hole workpiece (4) which is vertically clamped by a special horizontal clamp (3) is connected with the output terminal (B), the array electrode is moved to a working area of a horizontal punching hole under the driving of a precise numerical control workbench (7), and the array hole is machined on the workpiece.

Description

technical field [0001] The invention relates to the processing of micro-array electrodes and array holes, in particular to a processing method for processing micro-array electrodes and on-line horizontal processing of micro-array holes on a micro-electric discharge wire cutting machine tool by using an electrostatic induction feeding method. technical background [0002] Micro-array electrodes and array holes have always been the subject of much attention in the fields of ultra-precision and micro-fabrication technology. As people's demand for tiny devices such as tiny molds, tiny nozzles, and biomedical sensors increases, the processing capabilities of micro-array electrodes and array holes also need to be improved urgently. In the field of micromachining, there are generally LIGA, MEMS and micro-EDM processing methods, but due to the expensive processing costs of LIGA and MEMS and relatively limited processing objects, micro-EDM has become the preferred processing method. ...

AI Technical Summary

Problems solved by technology

Due to the fine structure of the electrode itself, it is very difficult to re-clamp the electrode, and the second clamping also makes it difficult to guarantee the position accuracy

In addition, the traditional EDM method is vertical spindle machining. When machining array holes, the discharge chips in the machining gap are not easy to discharge, the machining state between electrodes is not guaranteed, and the discharge state is unstable, which affects the machining of array holes. Precision and Processing Quality

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