Evacuating device of temperature thermocouple casing of photovoltaic polycrystalline silicon ingot casting furnace
A technology of polysilicon ingot casting furnace and temperature measuring thermocouple, which is applied in the directions of polycrystalline material growth, single crystal growth, crystal growth, etc., can solve the leakage of outer alumina tube casing, affect the ingot cycle and ingot quality, Furnace can not be used normally and other problems, to achieve the effect of shortening the ingot casting cycle, rapid vacuuming, and improving the quality of the ingot
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[0012] The photovoltaic polysilicon ingot furnace temperature measuring thermocouple casing vacuum pumping device proposed by the present invention is described in detail as follows in conjunction with the accompanying drawings and embodiments:
[0013] Example of the structure of the photovoltaic polysilicon ingot furnace temperature measurement thermocouple sleeve vacuum pumping device of the present invention figure 1 shown. The device includes: thermocouple casing 2 for temperature control and temperature measurement, thermocouple casing 3 for over-temperature protection and temperature measurement, and vacuum pump unit 7 to connect the thermocouple casing 2 for temperature control and temperature measurement and thermocouple for over-temperature protection to The casing 3 is connected to the vacuum pump group 7, the casing vacuum valve 8, the temperature control temperature measurement thermocouple manual valve 9 and the over temperature protection temperature measurement...
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