TFT-LCD array substrate and manufacturing method thereof

Abstract

The invention relates to a TFT-LCD array substrate and a manufacturing method thereof. The array substrate comprises a gate line, a data line, pixel electrodes and thin film transistors which are formed on the substrate, wherein a cavity containing a parasitic area is arranged between the thin film transistors; the parasitic area is the overlap area between a drain electrode and a gate electrode;the gate line and the gate electrode are formed on the substrate; an insulating layer is formed on the gate line and the gate electrode; and the cavity is formed by a groove arranged on the insulating layer. Through forming the cavity structure in the overlap area between the drain electrode and the gate electrode, the invention reduces the dielectric constant of the dielectric layer between the drain electrode and the gate electrode, effectively reduces the parasitic capacitance and further effectively reduces the leaping voltage generated by the pixel electrodes. Reduction of the leaping voltage can effectively reduce unevenness of the leaping voltage generated by each pixel electrode and eliminates various mura defects. The invention has simple technical means, is easy to implement andhas wide application prospect.

Description

technical field [0001] The invention relates to a thin film transistor liquid crystal display and a manufacturing method thereof, in particular to a TFT-LCD array substrate and a manufacturing method thereof. Background technique [0002] Thin Film Transistor Liquid Crystal Display (TFT-LCD for short) has the characteristics of small size, low power consumption, and no radiation, and occupies a dominant position in the current flat panel display market. TFT-LCD is mainly composed of an array substrate and a color filter substrate that are boxed together and liquid crystal is sandwiched between them. On the array substrate, gate lines and data lines that cross each other and define the pixel area are formed. Each pixel area is provided with Thin film transistors and pixel electrodes, black matrix, color resin patterns and common electrodes are formed on the color filter substrate. In the existing TFT-LCD structure, due to a certain overlapping area between the drain electrod...

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Problems solved by technology

[0003] Studies have shown that the existence of the jump voltage will change the polarity of the pixel electrodes, resulting in inconsistent voltage differences between positive and negative polarities, which will affect the display quality. At the same time, if the jump voltage of each pixel electrode is uneven, the screen will display gray Inhomogeneity, resulting in various types of watermark (mura) defects

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