Annealing method for preventing porous anodic aluminum oxide (AAO) template from curling
A technology of alumina template and porous anode, which is applied in nano-synthesis and micro-nano fields, can solve the problems of curling of AAO template and cannot effectively solve the problem of thermal curling of AAO template
Inactive Publication Date: 2012-10-03
TIANJIN UNIV
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The research by Fernández Romero and others also found that the template without removing the barrier layer can effectively improve the template curling phenomenon, but in many applications, AAO templates with barrier layers and through holes are required, so this method cannot effectively solve the problem. Hot curl issue with AAO template
The above literature shows that the problem of curling of AAO templates during high-temperature annealing has been widely noticed and studied, but there is no effective solution so far.
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[0018] 1) Preparation of porous anodized aluminum oxide (AAO) template
[0019] Put high-purity aluminum foil (purity above 99.99%) into a muffle furnace and anneal at 550°C for 6 hours to eliminate the internal stress of the aluminum foil. The annealed aluminum foil is ultrasonically cleaned in acetone and absolute ethanol solutions for 15 minutes, to remove surface grease. Then, put the cleaned aluminum foil into a perchloric acid absolute ethanol mixture with a volume ratio of 1:4 for electropolishing to remove organic pollutants and oxide layers, and the polished aluminum foil surface is very bright and clean. The aluminum foil after the above pretreatment was used as the anode, and the copper sheet was used as the cathode to carry out anodic oxidation (primary oxidation) in oxalic acid, the solution concentration was 0.3mol / L, the electrolysis voltage was 40V, and the time was 10 hours. The template after the primary oxidation is put into a mixture of chromic acid (1.8%w...
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The invention provides an annealing method for preventing a porous anodic aluminum oxide (AAO) template from curling, comprising the following steps: (1) manufacturing the porous AAO template by adopting a conventional technology and carrying out through hole enlarging treatment; (2) taking a vacuum tubular furnace as an annealing furnace, placing the porous AAO template which is subject to through hole enlarging treatment into the tubular furnace, sealing off the discharge end of the annealing furnace, and introducing pressure preserving gas from the inlet end of the annealing furnace to ensure the gas pressure in the annealing furnace reaches 1.01 MPa; and (3) performing heating annealing on the porous AAO template, wherein air inflow and air displacement are regulated so as to ensure the pressure value of the pressure preserving gas in the annealing furnace is in the range of 1.01-1.10 MPa in the process until the annealing operation is finished. The annealing method for preventingthe porous AAO template from curling has the beneficial effects of solving the difficulties which bother researchers in the field for a long time, and playing an important role in broadening applied research of the AAO template and pushing technical progress in the field.
Description
(1) Technical field [0001] The invention relates to the fields of nano-synthesis and micro-nano technology, in particular to an annealing method for preventing curling of a porous anodized aluminum template. (2) Background technology [0002] As an ideal template material, porous anodic aluminum oxide (Anodic Aluminum Oxide, hereinafter referred to as AAO) template has a wide range of applications in the fields of nanosynthesis and micro-nano technology. The AAO template has a regular porous structure, a nearly precise hexagonal close-packed periodic arrangement, and the columnar channels are parallel to each other. The close-packed period and the pore diameter of the channels are adjustable and controllable, and have a high dielectric constant. A unique porous structure and excellent properties of alumina make AAO an ideal carrier for assembling nano-ordered composite structures (see literature R.C.Furneaux, W.R.Rigby, A.P.Davidson, Nature, 337 (1989) 147 and H.Masuda, K ....
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IPC IPC(8): C25D11/18
Inventor 阮永丰王丹丽张灵翠李文润邱春霞
Owner TIANJIN UNIV